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- W2115778612 abstract "Smaller feature dimensions of semiconductor devices mean that ldquokiller particlerdquo sizes are also smaller. Static charge affects process yields by increased attraction of these smaller particles to critical product surfaces. This paper describes a study that establishes the affect of charge neutralization in reducing Particles per Wafer Pass (PWP). Cost of ownership analysis shows the positive results on yield and return on investment (ROI)." @default.
- W2115778612 created "2016-06-24" @default.
- W2115778612 creator A5029505028 @default.
- W2115778612 date "2009-05-01" @default.
- W2115778612 modified "2023-09-25" @default.
- W2115778612 title "Increasing yields with in-tool ionization" @default.
- W2115778612 cites W2124661368 @default.
- W2115778612 doi "https://doi.org/10.1109/asmc.2009.5155976" @default.
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