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• W2115873749 abstract "To reduce the capacitance and mimprove the reliability of metal interconnects at the 32 nm node and beyond, a promising approach is to use a direct CMP process stopping in the porous ultra-low k material combined with a metallicself-aligned CoWP capping layer. We demonstrate on 45 nm technology node wafers, that our self-aligned barrier layer process is compatible with the direct CMP process." @default.
• W2115873749 created "2016-06-24" @default.
• W2115873749 creator A5004737862 @default.
• W2115873749 creator A5007359205 @default.
• W2115873749 creator A5024505786 @default.
• W2115873749 creator A5038211390 @default.
• W2115873749 creator A5044148491 @default.
• W2115873749 creator A5048296073 @default.
• W2115873749 creator A5056623960 @default.
• W2115873749 creator A5057033374 @default.
• W2115873749 creator A5088138996 @default.
• W2115873749 creator A5074345546 @default.
• W2115873749 date "2008-06-01" @default.
• W2115873749 modified "2023-10-18" @default.
• W2115873749 title "Investigation of the impact of CoWp self-aligned barrier deposition on the porous siOC properties after a direct CMP process" @default.
• W2115873749 cites W1979198426 @default.
• W2115873749 cites W2057329623 @default.
• W2115873749 cites W2094777764 @default.
• W2115873749 doi "https://doi.org/10.1109/iitc.2008.4546944" @default.
• W2115873749 hasPublicationYear "2008" @default.
• W2115873749 type Work @default.
• W2115873749 sameAs 2115873749 @default.
• W2115873749 citedByCount "0" @default.
• W2115873749 crossrefType "proceedings-article" @default.
• W2115873749 hasAuthorship W2115873749A5004737862 @default.
• W2115873749 hasAuthorship W2115873749A5007359205 @default.
• W2115873749 hasAuthorship W2115873749A5024505786 @default.
• W2115873749 hasAuthorship W2115873749A5038211390 @default.
• W2115873749 hasAuthorship W2115873749A5044148491 @default.
• W2115873749 hasAuthorship W2115873749A5048296073 @default.
• W2115873749 hasAuthorship W2115873749A5056623960 @default.
• W2115873749 hasAuthorship W2115873749A5057033374 @default.
• W2115873749 hasAuthorship W2115873749A5074345546 @default.
• W2115873749 hasAuthorship W2115873749A5088138996 @default.
• W2115873749 hasConcept C111919701 @default.
• W2115873749 hasConcept C121332964 @default.
• W2115873749 hasConcept C127413603 @default.
• W2115873749 hasConcept C147789679 @default.
• W2115873749 hasConcept C151730666 @default.
• W2115873749 hasConcept C159985019 @default.
• W2115873749 hasConcept C160671074 @default.
• W2115873749 hasConcept C163258240 @default.
• W2115873749 hasConcept C171250308 @default.
• W2115873749 hasConcept C17525397 @default.
• W2115873749 hasConcept C185592680 @default.
• W2115873749 hasConcept C192562407 @default.
• W2115873749 hasConcept C2779227376 @default.
• W2115873749 hasConcept C2779833192 @default.
• W2115873749 hasConcept C2816523 @default.
• W2115873749 hasConcept C30066665 @default.
• W2115873749 hasConcept C41008148 @default.
• W2115873749 hasConcept C43214815 @default.
• W2115873749 hasConcept C49040817 @default.
• W2115873749 hasConcept C62520636 @default.
• W2115873749 hasConcept C62611344 @default.
• W2115873749 hasConcept C64297162 @default.
• W2115873749 hasConcept C6648577 @default.
• W2115873749 hasConcept C66938386 @default.
• W2115873749 hasConcept C69544855 @default.
• W2115873749 hasConcept C86803240 @default.
• W2115873749 hasConcept C98045186 @default.
• W2115873749 hasConceptScore W2115873749C111919701 @default.
• W2115873749 hasConceptScore W2115873749C121332964 @default.
• W2115873749 hasConceptScore W2115873749C127413603 @default.
• W2115873749 hasConceptScore W2115873749C147789679 @default.
• W2115873749 hasConceptScore W2115873749C151730666 @default.
• W2115873749 hasConceptScore W2115873749C159985019 @default.
• W2115873749 hasConceptScore W2115873749C160671074 @default.
• W2115873749 hasConceptScore W2115873749C163258240 @default.
• W2115873749 hasConceptScore W2115873749C171250308 @default.
• W2115873749 hasConceptScore W2115873749C17525397 @default.
• W2115873749 hasConceptScore W2115873749C185592680 @default.
• W2115873749 hasConceptScore W2115873749C192562407 @default.
• W2115873749 hasConceptScore W2115873749C2779227376 @default.
• W2115873749 hasConceptScore W2115873749C2779833192 @default.
• W2115873749 hasConceptScore W2115873749C2816523 @default.
• W2115873749 hasConceptScore W2115873749C30066665 @default.
• W2115873749 hasConceptScore W2115873749C41008148 @default.
• W2115873749 hasConceptScore W2115873749C43214815 @default.
• W2115873749 hasConceptScore W2115873749C49040817 @default.
• W2115873749 hasConceptScore W2115873749C62520636 @default.
• W2115873749 hasConceptScore W2115873749C62611344 @default.
• W2115873749 hasConceptScore W2115873749C64297162 @default.
• W2115873749 hasConceptScore W2115873749C6648577 @default.
• W2115873749 hasConceptScore W2115873749C66938386 @default.
• W2115873749 hasConceptScore W2115873749C69544855 @default.
• W2115873749 hasConceptScore W2115873749C86803240 @default.
• W2115873749 hasConceptScore W2115873749C98045186 @default.
• W2115873749 hasLocation W21158737491 @default.
• W2115873749 hasOpenAccess W2115873749 @default.
• W2115873749 hasPrimaryLocation W21158737491 @default.
• W2115873749 hasRelatedWork W1994108056 @default.
• W2115873749 hasRelatedWork W2005582217 @default.
• W2115873749 hasRelatedWork W2008502164 @default.
• W2115873749 hasRelatedWork W2031482278 @default.
• W2115873749 hasRelatedWork W2125258389 @default.
• W2115873749 hasRelatedWork W2130591174 @default.
• W2115873749 hasRelatedWork W2136228353 @default.
• W2115873749 hasRelatedWork W2140363525 @default.
• W2115873749 hasRelatedWork W2155138674 @default.

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