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• W2115945968 abstract "The chemistry of argon, argon/nitrogen and argon/nitrogen/acetylene expanding thermal plasmas is investigated in order to unravel the role of plasma species in the fast deposition (up to 40 nm s-1) of hydrogenated amorphous carbon nitride (a-C:H:N) films. The precursor dissociation is determined and the emission from the different plasmas is compared in order to distinguish possible mechanisms for species production and excitation." @default.
• W2115945968 created "2016-06-24" @default.
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• W2115945968 date "2001-08-01" @default.
• W2115945968 modified "2023-09-27" @default.
• W2115945968 title "Investigation of processes in low-pressure expanding thermal plasmas used for carbon nitride deposition: I. Ar/N₂/C₂H₂plasma" @default.
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• W2115945968 doi "https://doi.org/10.1088/0963-0252/10/3/316" @default.
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