Matches in SemOpenAlex for { <https://semopenalex.org/work/W2116506989> ?p ?o ?g. }
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89
with 100 items per page.
- W2116506989 endingPage "92" @default.
- W2116506989 startingPage "90" @default.
- W2116506989 abstract "We show that the reverse short channel effect (RSCE) is reduced in NMOS devices made in thick silicon-on-insulator (SOI) material. The reduction of the RSCE depends on the thickness of the Si overlayer. It is found that the thinner the Si film, the less the threshold voltage roll-on. The experimental findings are explained by a decrease of the lateral distribution of silicon interstitials generated at the source and drain (S/D) region and are related with their high recombination velocity at the buried oxide. This method can be used to separately test the influence of S/D point defects on the RSCE from other different hypotheses reported in the literature. Coupled process-device simulation reveals that the method is very sensitive to fundamental point defect properties." @default.
- W2116506989 created "2016-06-24" @default.
- W2116506989 creator A5035361040 @default.
- W2116506989 creator A5042018200 @default.
- W2116506989 creator A5051466360 @default.
- W2116506989 creator A5069174957 @default.
- W2116506989 creator A5071752083 @default.
- W2116506989 date "1997-03-01" @default.
- W2116506989 modified "2023-10-01" @default.
- W2116506989 title "Reduction of the reverse short channel effect in thick SOI MOSFET's" @default.
- W2116506989 cites W1965058579 @default.
- W2116506989 cites W2055542736 @default.
- W2116506989 cites W2069451452 @default.
- W2116506989 cites W2074755541 @default.
- W2116506989 cites W2081691714 @default.
- W2116506989 cites W2106124642 @default.
- W2116506989 cites W2108903576 @default.
- W2116506989 cites W2156324771 @default.
- W2116506989 cites W2172263803 @default.
- W2116506989 cites W2537589677 @default.
- W2116506989 cites W2537859274 @default.
- W2116506989 cites W2764845330 @default.
- W2116506989 doi "https://doi.org/10.1109/55.556090" @default.
- W2116506989 hasPublicationYear "1997" @default.
- W2116506989 type Work @default.
- W2116506989 sameAs 2116506989 @default.
- W2116506989 citedByCount "9" @default.
- W2116506989 countsByYear W21165069892019 @default.
- W2116506989 crossrefType "journal-article" @default.
- W2116506989 hasAuthorship W2116506989A5035361040 @default.
- W2116506989 hasAuthorship W2116506989A5042018200 @default.
- W2116506989 hasAuthorship W2116506989A5051466360 @default.
- W2116506989 hasAuthorship W2116506989A5069174957 @default.
- W2116506989 hasAuthorship W2116506989A5071752083 @default.
- W2116506989 hasConcept C11918236 @default.
- W2116506989 hasConcept C119599485 @default.
- W2116506989 hasConcept C121332964 @default.
- W2116506989 hasConcept C127413603 @default.
- W2116506989 hasConcept C164675345 @default.
- W2116506989 hasConcept C165801399 @default.
- W2116506989 hasConcept C172385210 @default.
- W2116506989 hasConcept C192562407 @default.
- W2116506989 hasConcept C195370968 @default.
- W2116506989 hasConcept C197162436 @default.
- W2116506989 hasConcept C26873012 @default.
- W2116506989 hasConcept C2775913835 @default.
- W2116506989 hasConcept C2778413303 @default.
- W2116506989 hasConcept C33556034 @default.
- W2116506989 hasConcept C49040817 @default.
- W2116506989 hasConcept C53143962 @default.
- W2116506989 hasConcept C544956773 @default.
- W2116506989 hasConceptScore W2116506989C11918236 @default.
- W2116506989 hasConceptScore W2116506989C119599485 @default.
- W2116506989 hasConceptScore W2116506989C121332964 @default.
- W2116506989 hasConceptScore W2116506989C127413603 @default.
- W2116506989 hasConceptScore W2116506989C164675345 @default.
- W2116506989 hasConceptScore W2116506989C165801399 @default.
- W2116506989 hasConceptScore W2116506989C172385210 @default.
- W2116506989 hasConceptScore W2116506989C192562407 @default.
- W2116506989 hasConceptScore W2116506989C195370968 @default.
- W2116506989 hasConceptScore W2116506989C197162436 @default.
- W2116506989 hasConceptScore W2116506989C26873012 @default.
- W2116506989 hasConceptScore W2116506989C2775913835 @default.
- W2116506989 hasConceptScore W2116506989C2778413303 @default.
- W2116506989 hasConceptScore W2116506989C33556034 @default.
- W2116506989 hasConceptScore W2116506989C49040817 @default.
- W2116506989 hasConceptScore W2116506989C53143962 @default.
- W2116506989 hasConceptScore W2116506989C544956773 @default.
- W2116506989 hasIssue "3" @default.
- W2116506989 hasLocation W21165069891 @default.
- W2116506989 hasOpenAccess W2116506989 @default.
- W2116506989 hasPrimaryLocation W21165069891 @default.
- W2116506989 hasRelatedWork W2011860685 @default.
- W2116506989 hasRelatedWork W2051952389 @default.
- W2116506989 hasRelatedWork W2116506989 @default.
- W2116506989 hasRelatedWork W2134991678 @default.
- W2116506989 hasRelatedWork W2366253658 @default.
- W2116506989 hasRelatedWork W2533382295 @default.
- W2116506989 hasRelatedWork W2560748586 @default.
- W2116506989 hasRelatedWork W2933862164 @default.
- W2116506989 hasRelatedWork W3146973342 @default.
- W2116506989 hasRelatedWork W2159000463 @default.
- W2116506989 hasVolume "18" @default.
- W2116506989 isParatext "false" @default.
- W2116506989 isRetracted "false" @default.
- W2116506989 magId "2116506989" @default.
- W2116506989 workType "article" @default.