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- W2116712258 abstract "In the last two years, we have developed tow Extreme UV (EUV) mask fabrication process flows, namely the substractive metal and the damascene process flows, utilizing silicon wafer process tools. Both types of EUV mask have been tested in a 10X reduction EUV exposure system. Dense lines less than 100 nm in width have been printed using both 0.6 micrometers thick top surface imaging resists and ultra-thin DUV resist. The EUV masks used in EUV lithography development work have been routinely made by using the current wafer process tools. The two EUV mask processes that we have developed both have some advantages and disadvantages. The simpler subtractive metal process is compatible with the current reticle defect repair methodologies. On the other hand, the more complex damascene process facilitates mask cleaning and particle inspection." @default.
- W2116712258 created "2016-06-24" @default.
- W2116712258 creator A5002694870 @default.
- W2116712258 creator A5023194541 @default.
- W2116712258 creator A5028117599 @default.
- W2116712258 creator A5052762597 @default.
- W2116712258 creator A5070730497 @default.
- W2116712258 creator A5071071752 @default.
- W2116712258 creator A5088882443 @default.
- W2116712258 creator A5090557984 @default.
- W2116712258 date "1999-06-25" @default.
- W2116712258 modified "2023-09-26" @default.
- W2116712258 title "EUV mask patterning approaches" @default.
- W2116712258 cites W2085199134 @default.
- W2116712258 cites W2283852319 @default.
- W2116712258 doi "https://doi.org/10.1117/12.351102" @default.
- W2116712258 hasPublicationYear "1999" @default.
- W2116712258 type Work @default.
- W2116712258 sameAs 2116712258 @default.
- W2116712258 citedByCount "12" @default.
- W2116712258 crossrefType "proceedings-article" @default.
- W2116712258 hasAuthorship W2116712258A5002694870 @default.
- W2116712258 hasAuthorship W2116712258A5023194541 @default.
- W2116712258 hasAuthorship W2116712258A5028117599 @default.
- W2116712258 hasAuthorship W2116712258A5052762597 @default.
- W2116712258 hasAuthorship W2116712258A5070730497 @default.
- W2116712258 hasAuthorship W2116712258A5071071752 @default.
- W2116712258 hasAuthorship W2116712258A5088882443 @default.
- W2116712258 hasAuthorship W2116712258A5090557984 @default.
- W2116712258 hasConcept C105487726 @default.
- W2116712258 hasConcept C116372231 @default.
- W2116712258 hasConcept C120665830 @default.
- W2116712258 hasConcept C121332964 @default.
- W2116712258 hasConcept C133386390 @default.
- W2116712258 hasConcept C136525101 @default.
- W2116712258 hasConcept C142724271 @default.
- W2116712258 hasConcept C146024833 @default.
- W2116712258 hasConcept C146617872 @default.
- W2116712258 hasConcept C160671074 @default.
- W2116712258 hasConcept C162996421 @default.
- W2116712258 hasConcept C171250308 @default.
- W2116712258 hasConcept C177409738 @default.
- W2116712258 hasConcept C192562407 @default.
- W2116712258 hasConcept C204223013 @default.
- W2116712258 hasConcept C204787440 @default.
- W2116712258 hasConcept C2779227376 @default.
- W2116712258 hasConcept C49040817 @default.
- W2116712258 hasConcept C520434653 @default.
- W2116712258 hasConcept C53524968 @default.
- W2116712258 hasConcept C71924100 @default.
- W2116712258 hasConceptScore W2116712258C105487726 @default.
- W2116712258 hasConceptScore W2116712258C116372231 @default.
- W2116712258 hasConceptScore W2116712258C120665830 @default.
- W2116712258 hasConceptScore W2116712258C121332964 @default.
- W2116712258 hasConceptScore W2116712258C133386390 @default.
- W2116712258 hasConceptScore W2116712258C136525101 @default.
- W2116712258 hasConceptScore W2116712258C142724271 @default.
- W2116712258 hasConceptScore W2116712258C146024833 @default.
- W2116712258 hasConceptScore W2116712258C146617872 @default.
- W2116712258 hasConceptScore W2116712258C160671074 @default.
- W2116712258 hasConceptScore W2116712258C162996421 @default.
- W2116712258 hasConceptScore W2116712258C171250308 @default.
- W2116712258 hasConceptScore W2116712258C177409738 @default.
- W2116712258 hasConceptScore W2116712258C192562407 @default.
- W2116712258 hasConceptScore W2116712258C204223013 @default.
- W2116712258 hasConceptScore W2116712258C204787440 @default.
- W2116712258 hasConceptScore W2116712258C2779227376 @default.
- W2116712258 hasConceptScore W2116712258C49040817 @default.
- W2116712258 hasConceptScore W2116712258C520434653 @default.
- W2116712258 hasConceptScore W2116712258C53524968 @default.
- W2116712258 hasConceptScore W2116712258C71924100 @default.
- W2116712258 hasLocation W21167122581 @default.
- W2116712258 hasOpenAccess W2116712258 @default.
- W2116712258 hasPrimaryLocation W21167122581 @default.
- W2116712258 hasRelatedWork W1998341457 @default.
- W2116712258 hasRelatedWork W2027095012 @default.
- W2116712258 hasRelatedWork W2050243074 @default.
- W2116712258 hasRelatedWork W2082761180 @default.
- W2116712258 hasRelatedWork W2089259287 @default.
- W2116712258 hasRelatedWork W2114583378 @default.
- W2116712258 hasRelatedWork W2116712258 @default.
- W2116712258 hasRelatedWork W2921363324 @default.
- W2116712258 hasRelatedWork W3132146265 @default.
- W2116712258 hasRelatedWork W4381056992 @default.
- W2116712258 isParatext "false" @default.
- W2116712258 isRetracted "false" @default.
- W2116712258 magId "2116712258" @default.
- W2116712258 workType "article" @default.