Matches in SemOpenAlex for { <https://semopenalex.org/work/W2116736627> ?p ?o ?g. }
Showing items 1 to 68 of
68
with 100 items per page.
- W2116736627 endingPage "1646" @default.
- W2116736627 startingPage "1639" @default.
- W2116736627 abstract "Both yield and quality of silicon monolithic integrated circuits depend on adequate control at all stages of their manufacture. Such control depends on measurement at each step, beginning with the selection of the substrate wafer, process chemicals, and parts, through the fabrication, assembly, and packaging of the finished circuit. The American Society for Testing and Materials Committee F-1 has developed standards for tests which have been widely used in the exchange of materials at various interfaces in the electron device industry. Many of these can be readily adapted for in-process control as well as for materials and parts acceptance tests. These standards and the process by which they were developed are reviewed; the importance of both industrial participation and the technical support activities of the National Bureau of Standards in this development is indicated. The need for additional standards is emphasized." @default.
- W2116736627 created "2016-06-24" @default.
- W2116736627 creator A5029514693 @default.
- W2116736627 creator A5058295587 @default.
- W2116736627 date "1969-01-01" @default.
- W2116736627 modified "2023-09-26" @default.
- W2116736627 title "Measurement standards for integrated circuit processing" @default.
- W2116736627 doi "https://doi.org/10.1109/proc.1969.7349" @default.
- W2116736627 hasPublicationYear "1969" @default.
- W2116736627 type Work @default.
- W2116736627 sameAs 2116736627 @default.
- W2116736627 citedByCount "2" @default.
- W2116736627 crossrefType "journal-article" @default.
- W2116736627 hasAuthorship W2116736627A5029514693 @default.
- W2116736627 hasAuthorship W2116736627A5058295587 @default.
- W2116736627 hasConcept C111472728 @default.
- W2116736627 hasConcept C111919701 @default.
- W2116736627 hasConcept C117671659 @default.
- W2116736627 hasConcept C119599485 @default.
- W2116736627 hasConcept C127413603 @default.
- W2116736627 hasConcept C138885662 @default.
- W2116736627 hasConcept C154945302 @default.
- W2116736627 hasConcept C155386361 @default.
- W2116736627 hasConcept C160671074 @default.
- W2116736627 hasConcept C21880701 @default.
- W2116736627 hasConcept C2775924081 @default.
- W2116736627 hasConcept C2779530757 @default.
- W2116736627 hasConcept C35750839 @default.
- W2116736627 hasConcept C41008148 @default.
- W2116736627 hasConcept C530198007 @default.
- W2116736627 hasConcept C98045186 @default.
- W2116736627 hasConceptScore W2116736627C111472728 @default.
- W2116736627 hasConceptScore W2116736627C111919701 @default.
- W2116736627 hasConceptScore W2116736627C117671659 @default.
- W2116736627 hasConceptScore W2116736627C119599485 @default.
- W2116736627 hasConceptScore W2116736627C127413603 @default.
- W2116736627 hasConceptScore W2116736627C138885662 @default.
- W2116736627 hasConceptScore W2116736627C154945302 @default.
- W2116736627 hasConceptScore W2116736627C155386361 @default.
- W2116736627 hasConceptScore W2116736627C160671074 @default.
- W2116736627 hasConceptScore W2116736627C21880701 @default.
- W2116736627 hasConceptScore W2116736627C2775924081 @default.
- W2116736627 hasConceptScore W2116736627C2779530757 @default.
- W2116736627 hasConceptScore W2116736627C35750839 @default.
- W2116736627 hasConceptScore W2116736627C41008148 @default.
- W2116736627 hasConceptScore W2116736627C530198007 @default.
- W2116736627 hasConceptScore W2116736627C98045186 @default.
- W2116736627 hasIssue "9" @default.
- W2116736627 hasLocation W21167366271 @default.
- W2116736627 hasOpenAccess W2116736627 @default.
- W2116736627 hasPrimaryLocation W21167366271 @default.
- W2116736627 hasRelatedWork W2023809375 @default.
- W2116736627 hasRelatedWork W2060853156 @default.
- W2116736627 hasRelatedWork W2123648361 @default.
- W2116736627 hasRelatedWork W2130125365 @default.
- W2116736627 hasRelatedWork W2359201265 @default.
- W2116736627 hasRelatedWork W2379496536 @default.
- W2116736627 hasRelatedWork W2382794808 @default.
- W2116736627 hasRelatedWork W2755229121 @default.
- W2116736627 hasRelatedWork W4324117082 @default.
- W2116736627 hasRelatedWork W1539369314 @default.
- W2116736627 hasVolume "57" @default.
- W2116736627 isParatext "false" @default.
- W2116736627 isRetracted "false" @default.
- W2116736627 magId "2116736627" @default.
- W2116736627 workType "article" @default.