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• W2116736717 abstract "Surface-channel PMOSFET's have been realized using a dopant-drive-out technique with WSi/sub x/ polycide gate. The advantages of this technique include (1) excellent thermal stability, (2) superior electrical device characteristics suitable for deep sub-half micron technology, (3) 10 Omega / Square Operator sheet resistance for a thin gate stack ( >" @default.
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• W2116736717 date "2002-12-31" @default.
• W2116736717 modified "2023-09-27" @default.
• W2116736717 title "Device fabrication and characteristics of surface-channel PMOSFET with WSi/sub x/ polycide gate using dopant drive-out technique" @default.
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• W2116736717 doi "https://doi.org/10.1109/vtsa.1993.263618" @default.
• W2116736717 hasPublicationYear "2002" @default.
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