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• W2116746908 abstract "This paper provides a detailed process flow for fabricating an easy-to-prepare, inexpensive, dense array of tungsten microelectrodes. We designed the process flow to minimize routine tasks by separating an initial preparation of a master mold from a routine preparation of substrate replication, array assembly and tip processing. Sandblast processing first produced a glass mold with a pattern of a series of protruding lines at a requested interval of a few hundred micrometers. Copying the groove pattern onto polystyrene mass-produced a replica substrate. Tungsten probes were then aligned on the substrate, and the tips of probes were finely processed in the block." @default.
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• W2116746908 date "2005-05-01" @default.
• W2116746908 modified "2023-09-30" @default.
• W2116746908 title "Easy-to-Prepare Assembly Array of Tungsten Microelectrodes" @default.
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• W2116746908 doi "https://doi.org/10.1109/tbme.2005.845224" @default.
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