Matches in SemOpenAlex for { <https://semopenalex.org/work/W2116779675> ?p ?o ?g. }
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91
with 100 items per page.
- W2116779675 endingPage "1385" @default.
- W2116779675 startingPage "1380" @default.
- W2116779675 abstract "Fully-depleted 20-nm SOI complementary metal-oxide-semiconductor field effect transistors (CMOSFETs) were successfully fabricated without a raised source/drain (S/D) structure, instead using low-temperature selective tungsten CVD (SWCVD) technology that can reduce the S/D series resistance. The thickness of the residual SOI layer under the W-clad layer in the S/D region was 6 nm for an nMOSFET and 9 nm for a pMOSFET. For 0.15-/spl mu/m-gate CMOSFETs, the subthreshold swings were 70 and 75 mV/dec for the nMOSFET and pMOSFET, respectively. The effectiveness of SWCVD technology when applied to ultrathin SOI devices was confirmed by small Si consumption and good continuity between the W and SOI layers. We expect that the S/D series resistance can be reduced to less than 1 k/spl Omega/-/spl mu/m by optimizing the S/D implantation conditions." @default.
- W2116779675 created "2016-06-24" @default.
- W2116779675 creator A5048338630 @default.
- W2116779675 creator A5071434634 @default.
- W2116779675 creator A5082731970 @default.
- W2116779675 creator A5083650408 @default.
- W2116779675 date "2001-07-01" @default.
- W2116779675 modified "2023-10-16" @default.
- W2116779675 title "Fully depleted 20-nm SOI CMOSFETs with W-clad gate/source/drain layers" @default.
- W2116779675 cites W1812132505 @default.
- W2116779675 cites W1975507931 @default.
- W2116779675 cites W1988343149 @default.
- W2116779675 cites W1990730149 @default.
- W2116779675 cites W2024172140 @default.
- W2116779675 cites W2029806001 @default.
- W2116779675 cites W2031599074 @default.
- W2116779675 cites W2039702967 @default.
- W2116779675 cites W2041082990 @default.
- W2116779675 cites W2052761411 @default.
- W2116779675 cites W2072797704 @default.
- W2116779675 cites W2121471545 @default.
- W2116779675 cites W2126530812 @default.
- W2116779675 cites W2130805035 @default.
- W2116779675 cites W2137092278 @default.
- W2116779675 cites W2168427332 @default.
- W2116779675 cites W4255124853 @default.
- W2116779675 doi "https://doi.org/10.1109/16.930655" @default.
- W2116779675 hasPublicationYear "2001" @default.
- W2116779675 type Work @default.
- W2116779675 sameAs 2116779675 @default.
- W2116779675 citedByCount "10" @default.
- W2116779675 countsByYear W21167796752014 @default.
- W2116779675 countsByYear W21167796752016 @default.
- W2116779675 crossrefType "journal-article" @default.
- W2116779675 hasAuthorship W2116779675A5048338630 @default.
- W2116779675 hasAuthorship W2116779675A5071434634 @default.
- W2116779675 hasAuthorship W2116779675A5082731970 @default.
- W2116779675 hasAuthorship W2116779675A5083650408 @default.
- W2116779675 hasConcept C103566474 @default.
- W2116779675 hasConcept C119599485 @default.
- W2116779675 hasConcept C127413603 @default.
- W2116779675 hasConcept C14485415 @default.
- W2116779675 hasConcept C156465305 @default.
- W2116779675 hasConcept C165801399 @default.
- W2116779675 hasConcept C172385210 @default.
- W2116779675 hasConcept C191897082 @default.
- W2116779675 hasConcept C192562407 @default.
- W2116779675 hasConcept C2778413303 @default.
- W2116779675 hasConcept C46362747 @default.
- W2116779675 hasConcept C49040817 @default.
- W2116779675 hasConcept C53143962 @default.
- W2116779675 hasConcept C542268612 @default.
- W2116779675 hasConcept C544956773 @default.
- W2116779675 hasConcept C57863236 @default.
- W2116779675 hasConceptScore W2116779675C103566474 @default.
- W2116779675 hasConceptScore W2116779675C119599485 @default.
- W2116779675 hasConceptScore W2116779675C127413603 @default.
- W2116779675 hasConceptScore W2116779675C14485415 @default.
- W2116779675 hasConceptScore W2116779675C156465305 @default.
- W2116779675 hasConceptScore W2116779675C165801399 @default.
- W2116779675 hasConceptScore W2116779675C172385210 @default.
- W2116779675 hasConceptScore W2116779675C191897082 @default.
- W2116779675 hasConceptScore W2116779675C192562407 @default.
- W2116779675 hasConceptScore W2116779675C2778413303 @default.
- W2116779675 hasConceptScore W2116779675C46362747 @default.
- W2116779675 hasConceptScore W2116779675C49040817 @default.
- W2116779675 hasConceptScore W2116779675C53143962 @default.
- W2116779675 hasConceptScore W2116779675C542268612 @default.
- W2116779675 hasConceptScore W2116779675C544956773 @default.
- W2116779675 hasConceptScore W2116779675C57863236 @default.
- W2116779675 hasIssue "7" @default.
- W2116779675 hasLocation W21167796751 @default.
- W2116779675 hasOpenAccess W2116779675 @default.
- W2116779675 hasPrimaryLocation W21167796751 @default.
- W2116779675 hasRelatedWork W1985611908 @default.
- W2116779675 hasRelatedWork W2033800539 @default.
- W2116779675 hasRelatedWork W2116779675 @default.
- W2116779675 hasRelatedWork W2136334496 @default.
- W2116779675 hasRelatedWork W2144070335 @default.
- W2116779675 hasRelatedWork W2150230469 @default.
- W2116779675 hasRelatedWork W2155862685 @default.
- W2116779675 hasRelatedWork W2165411445 @default.
- W2116779675 hasRelatedWork W2166081033 @default.
- W2116779675 hasRelatedWork W2217081898 @default.
- W2116779675 hasVolume "48" @default.
- W2116779675 isParatext "false" @default.
- W2116779675 isRetracted "false" @default.
- W2116779675 magId "2116779675" @default.
- W2116779675 workType "article" @default.