Matches in SemOpenAlex for { <https://semopenalex.org/work/W2116784641> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2116784641 abstract "We describe the design, fabrication, and characterization of a buried polysilicon hot-wire anemometer with an integrated micromachined channel for fluid flow sensing. Hot-wire flow sensor elements and bulk micromachined channels are fabricated separately on device and channel wafers. The direct silicon wafer bonding technique is then used to integrate the flow sensors and channels. This is made possible by fabrication of the polysilicon resistor flow sensing element in a trench. Heavily doped polysilicon connections are also recessed into the device wafer. The attraction of using polysilicon for the flow sensing element and connections is the ability to adjust the resistivity and temperature coefficient of resistance (TCR) by control of the dopant concentration. The effect of doping on both these parameters is characterized in detail to enable selection of the appropriate doping concentration for each region of the device. Light doping is preferred for the resistor element, since this ensures high thermal sensitivity, while heavy doping is used to provide low resistance connections. The materials allow use of standard high-temperature fabrication processes compatible with standard integrated circuit (IC) technology and micromachining techniques, including silicon bonding. This offers the ability to integrate other microfluidic components and electronic control circuits." @default.
- W2116784641 created "2016-06-24" @default.
- W2116784641 creator A5001831629 @default.
- W2116784641 creator A5007009932 @default.
- W2116784641 creator A5035646315 @default.
- W2116784641 creator A5045646612 @default.
- W2116784641 date "2004-07-01" @default.
- W2116784641 modified "2023-10-18" @default.
- W2116784641 title "Buried polysilicon hot-wire anemometer with integrated bulk micromachined channel" @default.
- W2116784641 cites W1967428644 @default.
- W2116784641 cites W2023872915 @default.
- W2116784641 cites W2056584136 @default.
- W2116784641 cites W2059590165 @default.
- W2116784641 cites W2075960306 @default.
- W2116784641 cites W2080240036 @default.
- W2116784641 cites W2082737935 @default.
- W2116784641 cites W2097181576 @default.
- W2116784641 cites W2107083155 @default.
- W2116784641 cites W2124645809 @default.
- W2116784641 cites W2128559319 @default.
- W2116784641 cites W2161204364 @default.
- W2116784641 cites W2178357416 @default.
- W2116784641 cites W3118333201 @default.
- W2116784641 doi "https://doi.org/10.1117/1.1758726" @default.
- W2116784641 hasPublicationYear "2004" @default.
- W2116784641 type Work @default.
- W2116784641 sameAs 2116784641 @default.
- W2116784641 citedByCount "1" @default.
- W2116784641 crossrefType "journal-article" @default.
- W2116784641 hasAuthorship W2116784641A5001831629 @default.
- W2116784641 hasAuthorship W2116784641A5007009932 @default.
- W2116784641 hasAuthorship W2116784641A5035646315 @default.
- W2116784641 hasAuthorship W2116784641A5045646612 @default.
- W2116784641 hasConcept C119599485 @default.
- W2116784641 hasConcept C121332964 @default.
- W2116784641 hasConcept C127413603 @default.
- W2116784641 hasConcept C127882809 @default.
- W2116784641 hasConcept C136525101 @default.
- W2116784641 hasConcept C137488568 @default.
- W2116784641 hasConcept C142724271 @default.
- W2116784641 hasConcept C145667562 @default.
- W2116784641 hasConcept C153294291 @default.
- W2116784641 hasConcept C160671074 @default.
- W2116784641 hasConcept C161067210 @default.
- W2116784641 hasConcept C165801399 @default.
- W2116784641 hasConcept C172385210 @default.
- W2116784641 hasConcept C192562407 @default.
- W2116784641 hasConcept C204787440 @default.
- W2116784641 hasConcept C2361726 @default.
- W2116784641 hasConcept C24326235 @default.
- W2116784641 hasConcept C25356406 @default.
- W2116784641 hasConcept C49040817 @default.
- W2116784641 hasConcept C530198007 @default.
- W2116784641 hasConcept C544956773 @default.
- W2116784641 hasConcept C57863236 @default.
- W2116784641 hasConcept C71924100 @default.
- W2116784641 hasConceptScore W2116784641C119599485 @default.
- W2116784641 hasConceptScore W2116784641C121332964 @default.
- W2116784641 hasConceptScore W2116784641C127413603 @default.
- W2116784641 hasConceptScore W2116784641C127882809 @default.
- W2116784641 hasConceptScore W2116784641C136525101 @default.
- W2116784641 hasConceptScore W2116784641C137488568 @default.
- W2116784641 hasConceptScore W2116784641C142724271 @default.
- W2116784641 hasConceptScore W2116784641C145667562 @default.
- W2116784641 hasConceptScore W2116784641C153294291 @default.
- W2116784641 hasConceptScore W2116784641C160671074 @default.
- W2116784641 hasConceptScore W2116784641C161067210 @default.
- W2116784641 hasConceptScore W2116784641C165801399 @default.
- W2116784641 hasConceptScore W2116784641C172385210 @default.
- W2116784641 hasConceptScore W2116784641C192562407 @default.
- W2116784641 hasConceptScore W2116784641C204787440 @default.
- W2116784641 hasConceptScore W2116784641C2361726 @default.
- W2116784641 hasConceptScore W2116784641C24326235 @default.
- W2116784641 hasConceptScore W2116784641C25356406 @default.
- W2116784641 hasConceptScore W2116784641C49040817 @default.
- W2116784641 hasConceptScore W2116784641C530198007 @default.
- W2116784641 hasConceptScore W2116784641C544956773 @default.
- W2116784641 hasConceptScore W2116784641C57863236 @default.
- W2116784641 hasConceptScore W2116784641C71924100 @default.
- W2116784641 hasLocation W21167846411 @default.
- W2116784641 hasOpenAccess W2116784641 @default.
- W2116784641 hasPrimaryLocation W21167846411 @default.
- W2116784641 hasRelatedWork W2077666430 @default.
- W2116784641 hasRelatedWork W2085034595 @default.
- W2116784641 hasRelatedWork W2095423796 @default.
- W2116784641 hasRelatedWork W2148523941 @default.
- W2116784641 hasRelatedWork W2399397734 @default.
- W2116784641 hasRelatedWork W2460230608 @default.
- W2116784641 hasRelatedWork W2802661632 @default.
- W2116784641 hasRelatedWork W2901189866 @default.
- W2116784641 hasRelatedWork W3147595904 @default.
- W2116784641 hasRelatedWork W4296250578 @default.
- W2116784641 isParatext "false" @default.
- W2116784641 isRetracted "false" @default.
- W2116784641 magId "2116784641" @default.
- W2116784641 workType "article" @default.