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- W2117758206 abstract "Abstract A micro IC probe, which is a small, elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its deflection is 2 to 8 μm to accommodate height differences among LSI pads while maintaining contact." @default.
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- W2117758206 date "2000-03-01" @default.
- W2117758206 modified "2023-10-01" @default.
- W2117758206 title "Fabrication of micro IC probe for LSI testing" @default.
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- W2117758206 doi "https://doi.org/10.1016/s0924-4247(99)00257-5" @default.
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