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• W2117914725 abstract "A commonly used method for measurements of small liquid flows are membrane based thermoelectric flow sensors. High temperature stable flow sensors have been developed and fabricated at IMSAS. A pressure stable version of these sensors has been developed by creating a membrane with perforation. Thereby a backpressure compensation is achieved. Here we present the fabrication process, first measurements and simulation results showing pressure stability to at least 8 bar." @default.
• W2117914725 created "2016-06-24" @default.
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• W2117914725 date "2009-06-01" @default.
• W2117914725 modified "2023-10-18" @default.
• W2117914725 title "Pressure stable thermoelectric flow sensors by means of membrane perforation" @default.
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• W2117914725 doi "https://doi.org/10.1109/sensor.2009.5285929" @default.
• W2117914725 hasPublicationYear "2009" @default.
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