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- W2117932296 abstract "This work focuses on the development of a model predictive control algorithm to simultaneously regulate the aggregate surface slope and roughness of a thin film growth process to optimize thin film light reflectance and transmittance. Specifically, a two-stage thin film deposition process, which involves two microscopic processes: an adsorption process and a migration process, is modeled based on a one-dimensional solidon-solid square lattice via kinetic Monte Carlo (kMC) method. The first stage of this process utilizes a uniform deposition rate profile to control the thickness of the thin film and the second stage of the process utilizes a spatially distributed deposition profile to control the surface morphology of the thin film. An Edwards-Wilkinson (EW)-type equation with appropriately computed parameters is used to describe the dynamics of the surface height profile and predict the evolution of the aggregate root-mean-square (RMS) roughness and aggregate RMS slope. A model predictive control algorithm is then developed on the basis of the EW equation model to regulate the aggregate RMS slope and the aggregate RMS roughness at desired levels." @default.
- W2117932296 created "2016-06-24" @default.
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- W2117932296 date "2012-06-01" @default.
- W2117932296 modified "2023-09-26" @default.
- W2117932296 title "Predictive control of aggregate surface morphology in a two-stage thin film deposition process for improved light trapping" @default.
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- W2117932296 doi "https://doi.org/10.1109/acc.2012.6314746" @default.
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