Matches in SemOpenAlex for { <https://semopenalex.org/work/W2118046287> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2118046287 abstract "Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors[1, 2] on flexible substrates[1], none of the sensors have been integrally fabricated on the substrate[3]. Fabricating MEMS sensors on flexible substrates [4] along with display elements will provide new sensing capabilities and enhance functionality. We propose a MEMS capacitive sensor fabricated in a low temperature, flexible amorphous silicon process. This sensor will enable acoustic detection and have potential applications for blast dosimetry [5], a research topic currently of great interest." @default.
- W2118046287 created "2016-06-24" @default.
- W2118046287 creator A5003555268 @default.
- W2118046287 creator A5074118765 @default.
- W2118046287 creator A5078103916 @default.
- W2118046287 creator A5081838760 @default.
- W2118046287 date "2009-02-01" @default.
- W2118046287 modified "2023-09-26" @default.
- W2118046287 title "MEMS shock sensor fabricated on flexible substrate" @default.
- W2118046287 cites W1973755062 @default.
- W2118046287 cites W2012457726 @default.
- W2118046287 cites W2077837734 @default.
- W2118046287 cites W2122209110 @default.
- W2118046287 cites W2123986092 @default.
- W2118046287 cites W2137451012 @default.
- W2118046287 cites W2148844348 @default.
- W2118046287 cites W2153569771 @default.
- W2118046287 cites W2171759290 @default.
- W2118046287 cites W2604476064 @default.
- W2118046287 cites W1586496123 @default.
- W2118046287 doi "https://doi.org/10.1109/fedc.2009.5069281" @default.
- W2118046287 hasPublicationYear "2009" @default.
- W2118046287 type Work @default.
- W2118046287 sameAs 2118046287 @default.
- W2118046287 citedByCount "1" @default.
- W2118046287 countsByYear W21180462872022 @default.
- W2118046287 crossrefType "proceedings-article" @default.
- W2118046287 hasAuthorship W2118046287A5003555268 @default.
- W2118046287 hasAuthorship W2118046287A5074118765 @default.
- W2118046287 hasAuthorship W2118046287A5078103916 @default.
- W2118046287 hasAuthorship W2118046287A5081838760 @default.
- W2118046287 hasConcept C111368507 @default.
- W2118046287 hasConcept C119599485 @default.
- W2118046287 hasConcept C127313418 @default.
- W2118046287 hasConcept C127413603 @default.
- W2118046287 hasConcept C192562407 @default.
- W2118046287 hasConcept C206755178 @default.
- W2118046287 hasConcept C24326235 @default.
- W2118046287 hasConcept C2777289219 @default.
- W2118046287 hasConcept C37977207 @default.
- W2118046287 hasConcept C49040817 @default.
- W2118046287 hasConceptScore W2118046287C111368507 @default.
- W2118046287 hasConceptScore W2118046287C119599485 @default.
- W2118046287 hasConceptScore W2118046287C127313418 @default.
- W2118046287 hasConceptScore W2118046287C127413603 @default.
- W2118046287 hasConceptScore W2118046287C192562407 @default.
- W2118046287 hasConceptScore W2118046287C206755178 @default.
- W2118046287 hasConceptScore W2118046287C24326235 @default.
- W2118046287 hasConceptScore W2118046287C2777289219 @default.
- W2118046287 hasConceptScore W2118046287C37977207 @default.
- W2118046287 hasConceptScore W2118046287C49040817 @default.
- W2118046287 hasLocation W21180462871 @default.
- W2118046287 hasOpenAccess W2118046287 @default.
- W2118046287 hasPrimaryLocation W21180462871 @default.
- W2118046287 hasRelatedWork W2101311243 @default.
- W2118046287 hasRelatedWork W2217584405 @default.
- W2118046287 hasRelatedWork W2320794455 @default.
- W2118046287 hasRelatedWork W2382214376 @default.
- W2118046287 hasRelatedWork W2571864209 @default.
- W2118046287 hasRelatedWork W2744326163 @default.
- W2118046287 hasRelatedWork W2769542117 @default.
- W2118046287 hasRelatedWork W2798386134 @default.
- W2118046287 hasRelatedWork W2898096163 @default.
- W2118046287 hasRelatedWork W2948783074 @default.
- W2118046287 hasRelatedWork W3000928846 @default.
- W2118046287 hasRelatedWork W3028161158 @default.
- W2118046287 hasRelatedWork W3043362707 @default.
- W2118046287 hasRelatedWork W3089978369 @default.
- W2118046287 hasRelatedWork W3125415389 @default.
- W2118046287 hasRelatedWork W3137724894 @default.
- W2118046287 hasRelatedWork W2146246118 @default.
- W2118046287 hasRelatedWork W2471951650 @default.
- W2118046287 hasRelatedWork W2869816633 @default.
- W2118046287 hasRelatedWork W2932952345 @default.
- W2118046287 isParatext "false" @default.
- W2118046287 isRetracted "false" @default.
- W2118046287 magId "2118046287" @default.
- W2118046287 workType "article" @default.