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- W2118304003 abstract "Dynamical microroughening of the etch front of InP[100] due to Electron Cyclotron Resonance plasma etching was investigated. A quantitative study of the etch front morphology shows that the scaling law holds and the observed structure is self-affine. The low value of the growth exponent (/spl beta/=0.37) indicates that neither plasma reemission nor geometrical shadowing controls the Electron Cyclotron Resonance etching of InP." @default.
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- W2118304003 date "2002-11-07" @default.
- W2118304003 modified "2023-09-30" @default.
- W2118304003 title "Dynamic scaling of plasma etched InP surface" @default.
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- W2118304003 doi "https://doi.org/10.1109/iciprm.2000.850267" @default.
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