Matches in SemOpenAlex for { <https://semopenalex.org/work/W2118466170> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2118466170 abstract "A novel method for low temperature deposition of conformal TiN is reported. ACVD (advanced chemical vapor deposition) is a TiCl/sub 4/-based TiN deposition process which relies on the surface reactions of the adsorbed precursors. With this technique, conformal TiN films with resistivity as low as 130 /spl mu//spl Omega/-cm can be deposited at a deposition temperature of 500/spl deg/C and below. The results from the integration of ACVD-TiN with Si contacts and vias in high density devices indicate that ACVD-TiN is applicable to all levels of multilevel metallization for the next generation of ULSI devices." @default.
- W2118466170 created "2016-06-24" @default.
- W2118466170 creator A5005246271 @default.
- W2118466170 creator A5018367653 @default.
- W2118466170 creator A5043683672 @default.
- W2118466170 creator A5044856976 @default.
- W2118466170 creator A5058152211 @default.
- W2118466170 creator A5064002436 @default.
- W2118466170 creator A5080155053 @default.
- W2118466170 date "2002-11-27" @default.
- W2118466170 modified "2023-09-26" @default.
- W2118466170 title "Low temperature processing of conformal TiN by ACVD (advanced chemical vapor deposition) for multilevel metallization in high density ULSI devices" @default.
- W2118466170 doi "https://doi.org/10.1109/iitc.1998.704763" @default.
- W2118466170 hasPublicationYear "2002" @default.
- W2118466170 type Work @default.
- W2118466170 sameAs 2118466170 @default.
- W2118466170 citedByCount "0" @default.
- W2118466170 crossrefType "proceedings-article" @default.
- W2118466170 hasAuthorship W2118466170A5005246271 @default.
- W2118466170 hasAuthorship W2118466170A5018367653 @default.
- W2118466170 hasAuthorship W2118466170A5043683672 @default.
- W2118466170 hasAuthorship W2118466170A5044856976 @default.
- W2118466170 hasAuthorship W2118466170A5058152211 @default.
- W2118466170 hasAuthorship W2118466170A5064002436 @default.
- W2118466170 hasAuthorship W2118466170A5080155053 @default.
- W2118466170 hasConcept C151730666 @default.
- W2118466170 hasConcept C171250308 @default.
- W2118466170 hasConcept C191897082 @default.
- W2118466170 hasConcept C192562407 @default.
- W2118466170 hasConcept C2779227376 @default.
- W2118466170 hasConcept C2816523 @default.
- W2118466170 hasConcept C49040817 @default.
- W2118466170 hasConcept C525849907 @default.
- W2118466170 hasConcept C57410435 @default.
- W2118466170 hasConcept C64297162 @default.
- W2118466170 hasConcept C69544855 @default.
- W2118466170 hasConcept C86803240 @default.
- W2118466170 hasConceptScore W2118466170C151730666 @default.
- W2118466170 hasConceptScore W2118466170C171250308 @default.
- W2118466170 hasConceptScore W2118466170C191897082 @default.
- W2118466170 hasConceptScore W2118466170C192562407 @default.
- W2118466170 hasConceptScore W2118466170C2779227376 @default.
- W2118466170 hasConceptScore W2118466170C2816523 @default.
- W2118466170 hasConceptScore W2118466170C49040817 @default.
- W2118466170 hasConceptScore W2118466170C525849907 @default.
- W2118466170 hasConceptScore W2118466170C57410435 @default.
- W2118466170 hasConceptScore W2118466170C64297162 @default.
- W2118466170 hasConceptScore W2118466170C69544855 @default.
- W2118466170 hasConceptScore W2118466170C86803240 @default.
- W2118466170 hasLocation W21184661701 @default.
- W2118466170 hasOpenAccess W2118466170 @default.
- W2118466170 hasPrimaryLocation W21184661701 @default.
- W2118466170 hasRelatedWork W1508374551 @default.
- W2118466170 hasRelatedWork W1831785206 @default.
- W2118466170 hasRelatedWork W1939152133 @default.
- W2118466170 hasRelatedWork W1970915005 @default.
- W2118466170 hasRelatedWork W1976140595 @default.
- W2118466170 hasRelatedWork W2019551493 @default.
- W2118466170 hasRelatedWork W2023675974 @default.
- W2118466170 hasRelatedWork W2031491898 @default.
- W2118466170 hasRelatedWork W2078859552 @default.
- W2118466170 hasRelatedWork W2083721278 @default.
- W2118466170 hasRelatedWork W2088031742 @default.
- W2118466170 hasRelatedWork W2116414308 @default.
- W2118466170 hasRelatedWork W2135029204 @default.
- W2118466170 hasRelatedWork W2162658356 @default.
- W2118466170 hasRelatedWork W2535594094 @default.
- W2118466170 hasRelatedWork W2544758754 @default.
- W2118466170 hasRelatedWork W2590297700 @default.
- W2118466170 hasRelatedWork W2768588255 @default.
- W2118466170 hasRelatedWork W2970603479 @default.
- W2118466170 hasRelatedWork W367529729 @default.
- W2118466170 isParatext "false" @default.
- W2118466170 isRetracted "false" @default.
- W2118466170 magId "2118466170" @default.
- W2118466170 workType "article" @default.