Matches in SemOpenAlex for { <https://semopenalex.org/work/W2118640977> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2118640977 abstract "This paper reports the design, fabrication, and characterization of a millimeter diameter, surface micromachined Micro-Electro-Mechanical-Systems (MEMS) mirror, which is assembled perpendicular to the substrate and can be linearly and repeatedly traversed through 600 μm. The moving mirror, when combined with a fixed mirror and beamsplitter, make up a monolithic MEMS Michelson interferometer; all are made on the same substrate and in the same surface micromachined fabrication process. The beamsplitter has been specifically designed such that the motion of the mirror enables modulation of light over the 2-14 μm spectral region. The rapid scan MEMS Michelson interferometer is the engine behind a miniaturized, Fourier transform infrared (FTIR) absorption spectrometer. The FTIR measures the absorption of infrared (IR) radiation by a target material, which can be used for the detection and identification of gases, liquids, or solids. The fabrication of the mirror with the ability to displace 600 μm along the optical axis enables the miniaturized system to have species identification resolution, while leveraging wafer scale batch fabrication to enable extremely low system cost. The successful fabrication of the millimeter diameter mirrors and beamsplitter with interferometric alignment over the range of travel of the moving mirror promises unprecedented sensitivity relative to the size of the FTIR spectrometer system." @default.
- W2118640977 created "2016-06-24" @default.
- W2118640977 creator A5058772212 @default.
- W2118640977 creator A5059852572 @default.
- W2118640977 creator A5074824488 @default.
- W2118640977 creator A5077222320 @default.
- W2118640977 date "2009-05-01" @default.
- W2118640977 modified "2023-10-10" @default.
- W2118640977 title "High-resolution miniature FTIR spectrometer enabled by a large linear travel MEMS pop-up mirror" @default.
- W2118640977 cites W1561572527 @default.
- W2118640977 cites W1577616541 @default.
- W2118640977 cites W2104491368 @default.
- W2118640977 cites W2151380664 @default.
- W2118640977 cites W2285853913 @default.
- W2118640977 doi "https://doi.org/10.1117/12.818862" @default.
- W2118640977 hasPublicationYear "2009" @default.
- W2118640977 type Work @default.
- W2118640977 sameAs 2118640977 @default.
- W2118640977 citedByCount "11" @default.
- W2118640977 countsByYear W21186409772014 @default.
- W2118640977 countsByYear W21186409772015 @default.
- W2118640977 countsByYear W21186409772016 @default.
- W2118640977 countsByYear W21186409772017 @default.
- W2118640977 countsByYear W21186409772020 @default.
- W2118640977 countsByYear W21186409772021 @default.
- W2118640977 crossrefType "proceedings-article" @default.
- W2118640977 hasAuthorship W2118640977A5058772212 @default.
- W2118640977 hasAuthorship W2118640977A5059852572 @default.
- W2118640977 hasAuthorship W2118640977A5074824488 @default.
- W2118640977 hasAuthorship W2118640977A5077222320 @default.
- W2118640977 hasConcept C120665830 @default.
- W2118640977 hasConcept C121332964 @default.
- W2118640977 hasConcept C125287762 @default.
- W2118640977 hasConcept C136525101 @default.
- W2118640977 hasConcept C142724271 @default.
- W2118640977 hasConcept C145667562 @default.
- W2118640977 hasConcept C160671074 @default.
- W2118640977 hasConcept C160892712 @default.
- W2118640977 hasConcept C166689943 @default.
- W2118640977 hasConcept C192562407 @default.
- W2118640977 hasConcept C19819980 @default.
- W2118640977 hasConcept C204787440 @default.
- W2118640977 hasConcept C23576306 @default.
- W2118640977 hasConcept C33390570 @default.
- W2118640977 hasConcept C37977207 @default.
- W2118640977 hasConcept C49040817 @default.
- W2118640977 hasConcept C520434653 @default.
- W2118640977 hasConcept C71924100 @default.
- W2118640977 hasConcept C9809166 @default.
- W2118640977 hasConceptScore W2118640977C120665830 @default.
- W2118640977 hasConceptScore W2118640977C121332964 @default.
- W2118640977 hasConceptScore W2118640977C125287762 @default.
- W2118640977 hasConceptScore W2118640977C136525101 @default.
- W2118640977 hasConceptScore W2118640977C142724271 @default.
- W2118640977 hasConceptScore W2118640977C145667562 @default.
- W2118640977 hasConceptScore W2118640977C160671074 @default.
- W2118640977 hasConceptScore W2118640977C160892712 @default.
- W2118640977 hasConceptScore W2118640977C166689943 @default.
- W2118640977 hasConceptScore W2118640977C192562407 @default.
- W2118640977 hasConceptScore W2118640977C19819980 @default.
- W2118640977 hasConceptScore W2118640977C204787440 @default.
- W2118640977 hasConceptScore W2118640977C23576306 @default.
- W2118640977 hasConceptScore W2118640977C33390570 @default.
- W2118640977 hasConceptScore W2118640977C37977207 @default.
- W2118640977 hasConceptScore W2118640977C49040817 @default.
- W2118640977 hasConceptScore W2118640977C520434653 @default.
- W2118640977 hasConceptScore W2118640977C71924100 @default.
- W2118640977 hasConceptScore W2118640977C9809166 @default.
- W2118640977 hasLocation W21186409771 @default.
- W2118640977 hasOpenAccess W2118640977 @default.
- W2118640977 hasPrimaryLocation W21186409771 @default.
- W2118640977 hasRelatedWork W1014036322 @default.
- W2118640977 hasRelatedWork W1563566515 @default.
- W2118640977 hasRelatedWork W1571766405 @default.
- W2118640977 hasRelatedWork W1969122164 @default.
- W2118640977 hasRelatedWork W2044577511 @default.
- W2118640977 hasRelatedWork W2046650616 @default.
- W2118640977 hasRelatedWork W2114051864 @default.
- W2118640977 hasRelatedWork W2327121723 @default.
- W2118640977 hasRelatedWork W3121081721 @default.
- W2118640977 hasRelatedWork W2463122996 @default.
- W2118640977 isParatext "false" @default.
- W2118640977 isRetracted "false" @default.
- W2118640977 magId "2118640977" @default.
- W2118640977 workType "article" @default.