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- W2118982793 abstract "Determination of morphology and size distribution of primary and secondary abrasives of slurry is essential for optimization of CMP performance. The undiluted slurry was characterized in liquid phase using silicon based Nano-pipettes in TEM. To validate utility of Nano-pipettes, comparatively quantitative analysis was performed by cryo-TEM technique." @default.
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- W2118982793 date "2013-07-01" @default.
- W2118982793 modified "2023-10-06" @default.
- W2118982793 title "Application of TEM for distinguishing the primary and secondary abrasives of undiluted CMP slurry" @default.
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- W2118982793 doi "https://doi.org/10.1109/ipfa.2013.6599189" @default.
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