Matches in SemOpenAlex for { <https://semopenalex.org/work/W2119387518> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2119387518 abstract "Summary form only given. Using plasma source ion implantation (PSII) to create the shallow source and drain structures required for next generation devices may be a necessity. For example, future devices are predicted to require heavy metal doses be kept less than 3/spl times/10/sup 9/ atoms per square centimeter. Plasma purification is done using ion cyclotron resonance to selectively expel unwanted ions from the plasma where they are neutralized upon collision with the chamber wall and no longer an implantation hazard. With a computer simulation we determine the necessary field strengths and uniformity for plasma purification, cleaning efficiency and frequency/mass resolution of the method." @default.
- W2119387518 created "2016-06-24" @default.
- W2119387518 creator A5009306289 @default.
- W2119387518 creator A5056993390 @default.
- W2119387518 creator A5071950550 @default.
- W2119387518 creator A5075144030 @default.
- W2119387518 creator A5088326500 @default.
- W2119387518 date "2002-11-22" @default.
- W2119387518 modified "2023-09-26" @default.
- W2119387518 title "A plasma purification method for plasma source ion implantation doping of semiconductors" @default.
- W2119387518 cites W2043357917 @default.
- W2119387518 cites W2137749541 @default.
- W2119387518 doi "https://doi.org/10.1109/plasma.1997.604365" @default.
- W2119387518 hasPublicationYear "2002" @default.
- W2119387518 type Work @default.
- W2119387518 sameAs 2119387518 @default.
- W2119387518 citedByCount "0" @default.
- W2119387518 crossrefType "proceedings-article" @default.
- W2119387518 hasAuthorship W2119387518A5009306289 @default.
- W2119387518 hasAuthorship W2119387518A5056993390 @default.
- W2119387518 hasAuthorship W2119387518A5071950550 @default.
- W2119387518 hasAuthorship W2119387518A5075144030 @default.
- W2119387518 hasAuthorship W2119387518A5088326500 @default.
- W2119387518 hasConcept C121332964 @default.
- W2119387518 hasConcept C145148216 @default.
- W2119387518 hasConcept C162356407 @default.
- W2119387518 hasConcept C178790620 @default.
- W2119387518 hasConcept C184779094 @default.
- W2119387518 hasConcept C185544564 @default.
- W2119387518 hasConcept C185592680 @default.
- W2119387518 hasConcept C188224857 @default.
- W2119387518 hasConcept C192562407 @default.
- W2119387518 hasConcept C41823505 @default.
- W2119387518 hasConcept C43617362 @default.
- W2119387518 hasConcept C49040817 @default.
- W2119387518 hasConcept C57863236 @default.
- W2119387518 hasConcept C60581705 @default.
- W2119387518 hasConcept C82706917 @default.
- W2119387518 hasConceptScore W2119387518C121332964 @default.
- W2119387518 hasConceptScore W2119387518C145148216 @default.
- W2119387518 hasConceptScore W2119387518C162356407 @default.
- W2119387518 hasConceptScore W2119387518C178790620 @default.
- W2119387518 hasConceptScore W2119387518C184779094 @default.
- W2119387518 hasConceptScore W2119387518C185544564 @default.
- W2119387518 hasConceptScore W2119387518C185592680 @default.
- W2119387518 hasConceptScore W2119387518C188224857 @default.
- W2119387518 hasConceptScore W2119387518C192562407 @default.
- W2119387518 hasConceptScore W2119387518C41823505 @default.
- W2119387518 hasConceptScore W2119387518C43617362 @default.
- W2119387518 hasConceptScore W2119387518C49040817 @default.
- W2119387518 hasConceptScore W2119387518C57863236 @default.
- W2119387518 hasConceptScore W2119387518C60581705 @default.
- W2119387518 hasConceptScore W2119387518C82706917 @default.
- W2119387518 hasLocation W21193875181 @default.
- W2119387518 hasOpenAccess W2119387518 @default.
- W2119387518 hasPrimaryLocation W21193875181 @default.
- W2119387518 hasRelatedWork W2030273386 @default.
- W2119387518 hasRelatedWork W2061407937 @default.
- W2119387518 hasRelatedWork W2091949762 @default.
- W2119387518 hasRelatedWork W2105088989 @default.
- W2119387518 hasRelatedWork W2119387518 @default.
- W2119387518 hasRelatedWork W2157508800 @default.
- W2119387518 hasRelatedWork W2536901626 @default.
- W2119387518 hasRelatedWork W3040943442 @default.
- W2119387518 hasRelatedWork W4362663149 @default.
- W2119387518 hasRelatedWork W2083108293 @default.
- W2119387518 isParatext "false" @default.
- W2119387518 isRetracted "false" @default.
- W2119387518 magId "2119387518" @default.
- W2119387518 workType "article" @default.