Matches in SemOpenAlex for { <https://semopenalex.org/work/W2119698713> ?p ?o ?g. }
- W2119698713 endingPage "1258" @default.
- W2119698713 startingPage "1250" @default.
- W2119698713 abstract "The mechanical and ferroelectric behavior of freestanding lead zirconate titanate (PZT) -based thin film unimorph structures for microelectromechanical systems was investigated with uniaxial tension specimens of SiO2-TiPt-PZT-Pt, SiO2-TiPt-PZT, SiO2-TiPt, and individual SiO2 and Pt films. Full-field strains obtained with digital image correlation were used to compute the stress versus strain curves for each film combination and the properties of the PZT layer. The mechanical response of the 1-μm thick PZT films was nonlinear but nonhysteretic, and it deviated from linearity at 0.3-0.35% axial strain. The elastic modulus of the PZT was 84 ± 3 GPa and 60.5 ± 5 GPa in open and short circuit conditions, respectively. Failure of the PZT stacks initiated in the PZT layer at 510 ± 35 MPa and 356 ± 55 MPa, in open and short circuit conditions, respectively, while the presence of the top Pt electrode delayed failure initiation in the SiO2-TiPt-PZT-Pt stack compared to the SiO2-TiPt-PZT stack. The high field effective electroactive coefficient e31,eff calculated from biased PZT stacks subjected to various prestress amplitudes was in the range of -50 to -30 NV-1 m-1. The e31,eff was strongly dependent on the electric field for most applied stress amplitudes, but it remained constant with the applied field when the applied stress reached 400 M Pa." @default.
- W2119698713 created "2016-06-24" @default.
- W2119698713 creator A5009373211 @default.
- W2119698713 creator A5021125445 @default.
- W2119698713 creator A5023005963 @default.
- W2119698713 creator A5042050817 @default.
- W2119698713 creator A5059810170 @default.
- W2119698713 creator A5077175798 @default.
- W2119698713 date "2011-12-01" @default.
- W2119698713 modified "2023-09-26" @default.
- W2119698713 title "Mechanical and Ferroelectric Behavior of PZT-Based Thin Films" @default.
- W2119698713 cites W1715407980 @default.
- W2119698713 cites W1975855059 @default.
- W2119698713 cites W1977957228 @default.
- W2119698713 cites W1978982023 @default.
- W2119698713 cites W1979321746 @default.
- W2119698713 cites W1979440749 @default.
- W2119698713 cites W1979649446 @default.
- W2119698713 cites W1981484147 @default.
- W2119698713 cites W1982340369 @default.
- W2119698713 cites W1989611929 @default.
- W2119698713 cites W1992937992 @default.
- W2119698713 cites W1999814940 @default.
- W2119698713 cites W2001530708 @default.
- W2119698713 cites W2006193841 @default.
- W2119698713 cites W2007760265 @default.
- W2119698713 cites W2024961690 @default.
- W2119698713 cites W2043134636 @default.
- W2119698713 cites W2046422962 @default.
- W2119698713 cites W2047542304 @default.
- W2119698713 cites W2054355720 @default.
- W2119698713 cites W2054445416 @default.
- W2119698713 cites W2056616752 @default.
- W2119698713 cites W2058177976 @default.
- W2119698713 cites W2068076350 @default.
- W2119698713 cites W2074869505 @default.
- W2119698713 cites W2078359003 @default.
- W2119698713 cites W2089255251 @default.
- W2119698713 cites W2089616046 @default.
- W2119698713 cites W2099913437 @default.
- W2119698713 cites W2101739496 @default.
- W2119698713 cites W2116156895 @default.
- W2119698713 cites W2130721555 @default.
- W2119698713 cites W2146218304 @default.
- W2119698713 cites W2168486995 @default.
- W2119698713 cites W2193401856 @default.
- W2119698713 cites W2317919600 @default.
- W2119698713 cites W2571655722 @default.
- W2119698713 cites W4233975528 @default.
- W2119698713 cites W4300728540 @default.
- W2119698713 doi "https://doi.org/10.1109/jmems.2011.2167666" @default.
- W2119698713 hasPublicationYear "2011" @default.
- W2119698713 type Work @default.
- W2119698713 sameAs 2119698713 @default.
- W2119698713 citedByCount "25" @default.
- W2119698713 countsByYear W21196987132012 @default.
- W2119698713 countsByYear W21196987132013 @default.
- W2119698713 countsByYear W21196987132014 @default.
- W2119698713 countsByYear W21196987132015 @default.
- W2119698713 countsByYear W21196987132016 @default.
- W2119698713 countsByYear W21196987132017 @default.
- W2119698713 countsByYear W21196987132018 @default.
- W2119698713 countsByYear W21196987132019 @default.
- W2119698713 countsByYear W21196987132022 @default.
- W2119698713 crossrefType "journal-article" @default.
- W2119698713 hasAuthorship W2119698713A5009373211 @default.
- W2119698713 hasAuthorship W2119698713A5021125445 @default.
- W2119698713 hasAuthorship W2119698713A5023005963 @default.
- W2119698713 hasAuthorship W2119698713A5042050817 @default.
- W2119698713 hasAuthorship W2119698713A5059810170 @default.
- W2119698713 hasAuthorship W2119698713A5077175798 @default.
- W2119698713 hasConcept C133386390 @default.
- W2119698713 hasConcept C159985019 @default.
- W2119698713 hasConcept C171250308 @default.
- W2119698713 hasConcept C19067145 @default.
- W2119698713 hasConcept C192562407 @default.
- W2119698713 hasConcept C49040817 @default.
- W2119698713 hasConcept C79090758 @default.
- W2119698713 hasConceptScore W2119698713C133386390 @default.
- W2119698713 hasConceptScore W2119698713C159985019 @default.
- W2119698713 hasConceptScore W2119698713C171250308 @default.
- W2119698713 hasConceptScore W2119698713C19067145 @default.
- W2119698713 hasConceptScore W2119698713C192562407 @default.
- W2119698713 hasConceptScore W2119698713C49040817 @default.
- W2119698713 hasConceptScore W2119698713C79090758 @default.
- W2119698713 hasIssue "6" @default.
- W2119698713 hasLocation W21196987131 @default.
- W2119698713 hasOpenAccess W2119698713 @default.
- W2119698713 hasPrimaryLocation W21196987131 @default.
- W2119698713 hasRelatedWork W1809730843 @default.
- W2119698713 hasRelatedWork W1994103032 @default.
- W2119698713 hasRelatedWork W2014315543 @default.
- W2119698713 hasRelatedWork W2051270029 @default.
- W2119698713 hasRelatedWork W2082293200 @default.
- W2119698713 hasRelatedWork W2085259952 @default.
- W2119698713 hasRelatedWork W2380293314 @default.
- W2119698713 hasRelatedWork W2886057184 @default.
- W2119698713 hasRelatedWork W2943188944 @default.