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- W2119747030 abstract "Computational lithography has become indispensable when developing lithography solutions for advanced technology nodes. One of the essential instruments for optimizing full-chip process windows (PW) is source mask optimization (SMO). To avoid model calibration for each new optimized source, separable resist models need to be created such that a reliable model can be obtained simply by replacing the source in the existing OPC model. In this paper we start from a fully calibrated resist model and optimize a new source for which we want to create a reliable OPC model. Relying on the separability of the model, the initial illumination source is replaced by the new one while not changing any resist model parameters. In order to reach the accuracy needed for OPC, the best focus and best dose still need to be accurately determined. We will investigate two models that have the same new SMO source and original resist model. For one model the best focus and dose are determined by the simulated Bossung plot of one anchor feature. The second model’s best focus and exposure are determined by a small set of FEM experimental data. The quality of these two models is then evaluated by comparing them to a reference model, which is fully calibrated using a complete dataset for the new source. We show that the calibrated FEM OPC model can be extrapolated by simply changing the source. A limited amount of experimental FEM data is required to accurately determine the best focus and exposure for the new source. Best focus and exposure based on the anchor pattern simulation has a higher degree of uncertainty compared to a small set of experimental data." @default.
- W2119747030 created "2016-06-24" @default.
- W2119747030 creator A5013139227 @default.
- W2119747030 creator A5013622895 @default.
- W2119747030 creator A5031389829 @default.
- W2119747030 creator A5039837606 @default.
- W2119747030 creator A5046116183 @default.
- W2119747030 creator A5057712246 @default.
- W2119747030 creator A5068549713 @default.
- W2119747030 creator A5074951825 @default.
- W2119747030 creator A5084782810 @default.
- W2119747030 date "2013-04-12" @default.
- W2119747030 modified "2023-10-03" @default.
- W2119747030 title "OPC resist model separability validation after SMO source change" @default.
- W2119747030 cites W1969747452 @default.
- W2119747030 cites W1996445702 @default.
- W2119747030 cites W2017876842 @default.
- W2119747030 cites W2049344123 @default.
- W2119747030 doi "https://doi.org/10.1117/12.2011879" @default.
- W2119747030 hasPublicationYear "2013" @default.
- W2119747030 type Work @default.
- W2119747030 sameAs 2119747030 @default.
- W2119747030 citedByCount "0" @default.
- W2119747030 crossrefType "proceedings-article" @default.
- W2119747030 hasAuthorship W2119747030A5013139227 @default.
- W2119747030 hasAuthorship W2119747030A5013622895 @default.
- W2119747030 hasAuthorship W2119747030A5031389829 @default.
- W2119747030 hasAuthorship W2119747030A5039837606 @default.
- W2119747030 hasAuthorship W2119747030A5046116183 @default.
- W2119747030 hasAuthorship W2119747030A5057712246 @default.
- W2119747030 hasAuthorship W2119747030A5068549713 @default.
- W2119747030 hasAuthorship W2119747030A5074951825 @default.
- W2119747030 hasAuthorship W2119747030A5084782810 @default.
- W2119747030 hasConcept C105795698 @default.
- W2119747030 hasConcept C111919701 @default.
- W2119747030 hasConcept C120665830 @default.
- W2119747030 hasConcept C121332964 @default.
- W2119747030 hasConcept C127413603 @default.
- W2119747030 hasConcept C135628077 @default.
- W2119747030 hasConcept C165005293 @default.
- W2119747030 hasConcept C165838908 @default.
- W2119747030 hasConcept C171250308 @default.
- W2119747030 hasConcept C192209626 @default.
- W2119747030 hasConcept C192562407 @default.
- W2119747030 hasConcept C204223013 @default.
- W2119747030 hasConcept C2779227376 @default.
- W2119747030 hasConcept C33923547 @default.
- W2119747030 hasConcept C41008148 @default.
- W2119747030 hasConcept C53524968 @default.
- W2119747030 hasConcept C66938386 @default.
- W2119747030 hasConcept C76155785 @default.
- W2119747030 hasConcept C78371743 @default.
- W2119747030 hasConcept C98045186 @default.
- W2119747030 hasConceptScore W2119747030C105795698 @default.
- W2119747030 hasConceptScore W2119747030C111919701 @default.
- W2119747030 hasConceptScore W2119747030C120665830 @default.
- W2119747030 hasConceptScore W2119747030C121332964 @default.
- W2119747030 hasConceptScore W2119747030C127413603 @default.
- W2119747030 hasConceptScore W2119747030C135628077 @default.
- W2119747030 hasConceptScore W2119747030C165005293 @default.
- W2119747030 hasConceptScore W2119747030C165838908 @default.
- W2119747030 hasConceptScore W2119747030C171250308 @default.
- W2119747030 hasConceptScore W2119747030C192209626 @default.
- W2119747030 hasConceptScore W2119747030C192562407 @default.
- W2119747030 hasConceptScore W2119747030C204223013 @default.
- W2119747030 hasConceptScore W2119747030C2779227376 @default.
- W2119747030 hasConceptScore W2119747030C33923547 @default.
- W2119747030 hasConceptScore W2119747030C41008148 @default.
- W2119747030 hasConceptScore W2119747030C53524968 @default.
- W2119747030 hasConceptScore W2119747030C66938386 @default.
- W2119747030 hasConceptScore W2119747030C76155785 @default.
- W2119747030 hasConceptScore W2119747030C78371743 @default.
- W2119747030 hasConceptScore W2119747030C98045186 @default.
- W2119747030 hasLocation W21197470301 @default.
- W2119747030 hasOpenAccess W2119747030 @default.
- W2119747030 hasPrimaryLocation W21197470301 @default.
- W2119747030 hasRelatedWork W1975783263 @default.
- W2119747030 hasRelatedWork W1979756421 @default.
- W2119747030 hasRelatedWork W1983218957 @default.
- W2119747030 hasRelatedWork W1990405760 @default.
- W2119747030 hasRelatedWork W2013758239 @default.
- W2119747030 hasRelatedWork W2019303455 @default.
- W2119747030 hasRelatedWork W2024252210 @default.
- W2119747030 hasRelatedWork W2032410534 @default.
- W2119747030 hasRelatedWork W2048793607 @default.
- W2119747030 hasRelatedWork W2049344123 @default.
- W2119747030 hasRelatedWork W2055780105 @default.
- W2119747030 hasRelatedWork W2062094900 @default.
- W2119747030 hasRelatedWork W2069004321 @default.
- W2119747030 hasRelatedWork W2079616710 @default.
- W2119747030 hasRelatedWork W2082530708 @default.
- W2119747030 hasRelatedWork W2089672739 @default.
- W2119747030 hasRelatedWork W2092792021 @default.
- W2119747030 hasRelatedWork W2136475700 @default.
- W2119747030 hasRelatedWork W2158412113 @default.
- W2119747030 hasRelatedWork W2007301175 @default.
- W2119747030 isParatext "false" @default.
- W2119747030 isRetracted "false" @default.
- W2119747030 magId "2119747030" @default.
- W2119747030 workType "article" @default.