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• W2120176135 abstract "Digital planar holograms (DPH) are successfully fabricated for the first time by nanoimprint lithography (NIL). A state-of-the-art UV-NIL process is developed by combining both advantages of step and repeat technology at low pressure for high-throughput and imprinting of spin-coated resist films for easy pattern transfer. The nanofabrication process is used in order to replicate DPH structures, composed of multi-million lines grating, into silicon dioxide waveguide core. Optical performances of nanospectrometers chips are in agreement with simulations." @default.
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• W2120176135 date "2011-08-01" @default.
• W2120176135 modified "2023-10-14" @default.
• W2120176135 title "Digital spectrometer-on-chip fabricated by step and repeat nanoimprint lithography on pre-spin coated films" @default.
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• W2120176135 doi "https://doi.org/10.1016/j.mee.2010.12.078" @default.
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