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- W2120250680 abstract "Microassembly of a hybrid fluorescence detection microsystem by heterogeneous integration of a CdS thin-film filter, an (In, Ga)N thin-film blue LED, and a disposable PDMS microfluidic device onto a Si PIN photodetector substrate is described. The CdS thin film filter was deposited directly onto a photodetector by pulsed-laser deposition. A thin-film (In, Ga)N LED was then transferred by a novel “pixel-to-point” laser lift-off process from the sapphire growth substrate to the silicon photodetector substrate. The final integration step was achieved by positioning a disposable polymer microfludic device onto the excitation/detection subsystem. Pixel-to-point transfer is potentially an enabling microassembly process for the fabrication of multicolor fluorescence-based bioassays and chemical detection microsystems." @default.
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- W2120250680 date "2004-03-01" @default.
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- W2120250680 title "Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems" @default.
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- W2120250680 doi "https://doi.org/10.1016/j.sna.2003.10.015" @default.
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