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- W2120641722 abstract "We propose a new method of assembling 3D microsystems by means of chip level electrical interconnection. Silicon dies are flip-chipped out of a silicon wafer by using ICP-RIE instead of a dicing saw. Fringes of the chips are patterned into pin-shapes so that they can be vertically inserted into the micro motherboard for electrical and physical connection. The pins are coated with Cr-Au, and the contact pads are electroplated with Cu for low contact resistance. the pins are tapered in width, and assembling was easily done by manual positing under the optical binocular microscope. This technique is a break through to the hybrid integration of various kinds of micro chips independent of materials or fabrication compatibility." @default.
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- W2120641722 date "1999-03-10" @default.
- W2120641722 modified "2023-10-03" @default.
- W2120641722 title "Chip-level three-dimensional assembling of microsystems" @default.
- W2120641722 doi "https://doi.org/10.1117/12.341260" @default.
- W2120641722 hasPublicationYear "1999" @default.
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