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• W2120952817 abstract "Silicon carbide (SiC) films were prepared from methyltrichlorosilane (MTS) and H2 at temperatures ranging from 900 to 1000◦C by low-pressure chemical vapor deposition (CVD). Multi-scale analysis was performed on the SiC film growth rate using a growth rate profile for a tubular reactor that was 300 mm long from the inlet to the outlet and a step coverage (SC) profile for micron-sized trenches. The precursor consumption ratio was estimated using a quadrupole mass spectrometer (QMS). These systematic analyses revealed that MTS was not the direct growth species for SiC deposition. We concluded that there were two major growth species controlling the SiC deposition rate. The partial pressures of these species were estimated by SC and growth rate analyses. An elementary reaction simulation was performed to predict the SiC film growth species. A comparison between the elementary reaction simulation results and the multi-scale analysis suggested several chemical species as candidates for the direct growth species. The candidates for the first species, with a low sticking probability of around 10 −3 ,w ere CH4 ,C 2H4 ,a nd C2H2, and candidates for the second species, with a high sticking probability of around 10 −1 ,w ere CH3 ,C 2H3 ,a nd C2H5." @default.
• W2120952817 created "2016-06-24" @default.
• W2120952817 creator A5020889984 @default.
• W2120952817 creator A5030380923 @default.
• W2120952817 creator A5034655121 @default.
• W2120952817 creator A5048624318 @default.
• W2120952817 creator A5049188489 @default.
• W2120952817 creator A5063423983 @default.
• W2120952817 creator A5074988848 @default.
• W2120952817 date "2013-01-01" @default.
• W2120952817 modified "2023-09-30" @default.
• W2120952817 title "Multi-Scale Analysis and Elementary Reaction Simulation of SiC-CVD Using CH3SiCl3/H2" @default.
• W2120952817 cites W1613791679 @default.
• W2120952817 cites W1618584074 @default.
• W2120952817 cites W1657752593 @default.
• W2120952817 cites W1668848517 @default.
• W2120952817 cites W1900350980 @default.
• W2120952817 cites W1960529005 @default.
• W2120952817 cites W1971813501 @default.
• W2120952817 cites W1973085287 @default.
• W2120952817 cites W1974984658 @default.
• W2120952817 cites W1977491673 @default.
• W2120952817 cites W1990523377 @default.
• W2120952817 cites W1992811425 @default.
• W2120952817 cites W1999567945 @default.
• W2120952817 cites W2002035659 @default.
• W2120952817 cites W2013947421 @default.
• W2120952817 cites W2017636308 @default.
• W2120952817 cites W2019889446 @default.
• W2120952817 cites W2021704063 @default.
• W2120952817 cites W2028077651 @default.
• W2120952817 cites W2041589085 @default.
• W2120952817 cites W2044643147 @default.
• W2120952817 cites W2047338772 @default.
• W2120952817 cites W2052165313 @default.
• W2120952817 cites W2054393026 @default.
• W2120952817 cites W2056925462 @default.
• W2120952817 cites W2057451432 @default.
• W2120952817 cites W2070730108 @default.
• W2120952817 cites W2077413495 @default.
• W2120952817 cites W2091483886 @default.
• W2120952817 cites W2098701827 @default.
• W2120952817 cites W2109834520 @default.
• W2120952817 cites W2117082547 @default.
• W2120952817 cites W2117908472 @default.
• W2120952817 cites W2121630873 @default.
• W2120952817 cites W2130987817 @default.
• W2120952817 cites W2149089906 @default.
• W2120952817 cites W2160286674 @default.
• W2120952817 cites W2325930694 @default.
• W2120952817 doi "https://doi.org/10.1149/2.039311jss" @default.
• W2120952817 hasPublicationYear "2013" @default.
• W2120952817 type Work @default.
• W2120952817 sameAs 2120952817 @default.
• W2120952817 citedByCount "15" @default.
• W2120952817 countsByYear W21209528172016 @default.
• W2120952817 countsByYear W21209528172017 @default.
• W2120952817 countsByYear W21209528172019 @default.
• W2120952817 countsByYear W21209528172020 @default.
• W2120952817 countsByYear W21209528172021 @default.
• W2120952817 countsByYear W21209528172022 @default.
• W2120952817 countsByYear W21209528172023 @default.
• W2120952817 crossrefType "journal-article" @default.
• W2120952817 hasAuthorship W2120952817A5020889984 @default.
• W2120952817 hasAuthorship W2120952817A5030380923 @default.
• W2120952817 hasAuthorship W2120952817A5034655121 @default.
• W2120952817 hasAuthorship W2120952817A5048624318 @default.
• W2120952817 hasAuthorship W2120952817A5049188489 @default.
• W2120952817 hasAuthorship W2120952817A5063423983 @default.
• W2120952817 hasAuthorship W2120952817A5074988848 @default.
• W2120952817 hasConcept C107872376 @default.
• W2120952817 hasConcept C113196181 @default.
• W2120952817 hasConcept C151730666 @default.
• W2120952817 hasConcept C159985019 @default.
• W2120952817 hasConcept C161790260 @default.
• W2120952817 hasConcept C171250308 @default.
• W2120952817 hasConcept C175113610 @default.
• W2120952817 hasConcept C178790620 @default.
• W2120952817 hasConcept C185592680 @default.
• W2120952817 hasConcept C192562407 @default.
• W2120952817 hasConcept C2524010 @default.
• W2120952817 hasConcept C2778312390 @default.
• W2120952817 hasConcept C2780722187 @default.
• W2120952817 hasConcept C2816523 @default.
• W2120952817 hasConcept C33923547 @default.
• W2120952817 hasConcept C57410435 @default.
• W2120952817 hasConcept C64297162 @default.
• W2120952817 hasConcept C86803240 @default.
• W2120952817 hasConceptScore W2120952817C107872376 @default.
• W2120952817 hasConceptScore W2120952817C113196181 @default.
• W2120952817 hasConceptScore W2120952817C151730666 @default.
• W2120952817 hasConceptScore W2120952817C159985019 @default.
• W2120952817 hasConceptScore W2120952817C161790260 @default.
• W2120952817 hasConceptScore W2120952817C171250308 @default.
• W2120952817 hasConceptScore W2120952817C175113610 @default.
• W2120952817 hasConceptScore W2120952817C178790620 @default.
• W2120952817 hasConceptScore W2120952817C185592680 @default.
• W2120952817 hasConceptScore W2120952817C192562407 @default.
• W2120952817 hasConceptScore W2120952817C2524010 @default.
• W2120952817 hasConceptScore W2120952817C2778312390 @default.

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