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- W2120974611 abstract "An efficient software package for the structure design and simulation of imaging properties of diffraction optical elements has been developed. It operates with point source and consists of: the ZON software, to calculate the structure of an optical element in transmission and reflection; the KRGF software, to simulate the diffraction properties of an ideal optical element with point source; the DS software, to calculate the diffraction properties by taking into consideration material and shadowing effects. Optional software allows simulation with a real non-point source. Zone plate thickness profile, source shape as well as substrate curvature are considered in this calculation. This is especially important for the diffractive focusing elements and gratings at a total external reflection, given that the lateral size of the structure can be up to 1 m. The program package can be used in combination with the Nanomaker software to prepare data for ion and e-beam surface modifications and corrections." @default.
- W2120974611 created "2016-06-24" @default.
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- W2120974611 date "2013-03-22" @default.
- W2120974611 modified "2023-09-23" @default.
- W2120974611 title "Dedicated software for diffractive optics design and simulation" @default.
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- W2120974611 doi "https://doi.org/10.1088/1742-6596/425/16/162004" @default.
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