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- W2121036149 abstract "In this paper we present unintuitive patterns generated by inverse lithography technology. We show examples of contact hole masks designed with ILT that enjoy larger process windows than OPC. We also show variations in ILT-generated masks as the pitch of the contact hole array changes. In another example, we show poly masks designed for better process window to be substantially different from poly masks designed for better fidelity at nominal exposure-defocus (ED) condition. The mask with better fidelity has broken lines in comparison to the original layout. In a third example, we show deep trench mask patterns designed with ILT that, at first glance, bear no resemblance to the original layout, yet provide high fidelity in optical images. These patterns, although complex at first sight, can be generated in substantially simpler form with proper constraints without losing the spirit of ILT masks." @default.
- W2121036149 created "2016-06-24" @default.
- W2121036149 creator A5004759804 @default.
- W2121036149 creator A5012501765 @default.
- W2121036149 creator A5024516963 @default.
- W2121036149 creator A5055137555 @default.
- W2121036149 date "2005-10-21" @default.
- W2121036149 modified "2023-10-17" @default.
- W2121036149 title "Inverse lithography technology principles in practice: unintuitive patterns" @default.
- W2121036149 cites W1998745808 @default.
- W2121036149 cites W2021247129 @default.
- W2121036149 cites W2057733951 @default.
- W2121036149 cites W2098485818 @default.
- W2121036149 cites W2145008084 @default.
- W2121036149 cites W1983832894 @default.
- W2121036149 doi "https://doi.org/10.1117/12.632366" @default.
- W2121036149 hasPublicationYear "2005" @default.
- W2121036149 type Work @default.
- W2121036149 sameAs 2121036149 @default.
- W2121036149 citedByCount "21" @default.
- W2121036149 countsByYear W21210361492014 @default.
- W2121036149 countsByYear W21210361492015 @default.
- W2121036149 countsByYear W21210361492016 @default.
- W2121036149 countsByYear W21210361492017 @default.
- W2121036149 countsByYear W21210361492018 @default.
- W2121036149 countsByYear W21210361492019 @default.
- W2121036149 crossrefType "proceedings-article" @default.
- W2121036149 hasAuthorship W2121036149A5004759804 @default.
- W2121036149 hasAuthorship W2121036149A5012501765 @default.
- W2121036149 hasAuthorship W2121036149A5024516963 @default.
- W2121036149 hasAuthorship W2121036149A5055137555 @default.
- W2121036149 hasConcept C113364801 @default.
- W2121036149 hasConcept C120665830 @default.
- W2121036149 hasConcept C121332964 @default.
- W2121036149 hasConcept C154945302 @default.
- W2121036149 hasConcept C155310634 @default.
- W2121036149 hasConcept C171250308 @default.
- W2121036149 hasConcept C192562407 @default.
- W2121036149 hasConcept C199360897 @default.
- W2121036149 hasConcept C204223013 @default.
- W2121036149 hasConcept C207467116 @default.
- W2121036149 hasConcept C24890656 @default.
- W2121036149 hasConcept C2524010 @default.
- W2121036149 hasConcept C2776459999 @default.
- W2121036149 hasConcept C2777441419 @default.
- W2121036149 hasConcept C2779227376 @default.
- W2121036149 hasConcept C33923547 @default.
- W2121036149 hasConcept C41008148 @default.
- W2121036149 hasConcept C76155785 @default.
- W2121036149 hasConcept C78371743 @default.
- W2121036149 hasConcept C98045186 @default.
- W2121036149 hasConceptScore W2121036149C113364801 @default.
- W2121036149 hasConceptScore W2121036149C120665830 @default.
- W2121036149 hasConceptScore W2121036149C121332964 @default.
- W2121036149 hasConceptScore W2121036149C154945302 @default.
- W2121036149 hasConceptScore W2121036149C155310634 @default.
- W2121036149 hasConceptScore W2121036149C171250308 @default.
- W2121036149 hasConceptScore W2121036149C192562407 @default.
- W2121036149 hasConceptScore W2121036149C199360897 @default.
- W2121036149 hasConceptScore W2121036149C204223013 @default.
- W2121036149 hasConceptScore W2121036149C207467116 @default.
- W2121036149 hasConceptScore W2121036149C24890656 @default.
- W2121036149 hasConceptScore W2121036149C2524010 @default.
- W2121036149 hasConceptScore W2121036149C2776459999 @default.
- W2121036149 hasConceptScore W2121036149C2777441419 @default.
- W2121036149 hasConceptScore W2121036149C2779227376 @default.
- W2121036149 hasConceptScore W2121036149C33923547 @default.
- W2121036149 hasConceptScore W2121036149C41008148 @default.
- W2121036149 hasConceptScore W2121036149C76155785 @default.
- W2121036149 hasConceptScore W2121036149C78371743 @default.
- W2121036149 hasConceptScore W2121036149C98045186 @default.
- W2121036149 hasLocation W21210361491 @default.
- W2121036149 hasOpenAccess W2121036149 @default.
- W2121036149 hasPrimaryLocation W21210361491 @default.
- W2121036149 hasRelatedWork W1997758026 @default.
- W2121036149 hasRelatedWork W2000358180 @default.
- W2121036149 hasRelatedWork W2002398964 @default.
- W2121036149 hasRelatedWork W2007311645 @default.
- W2121036149 hasRelatedWork W2051355679 @default.
- W2121036149 hasRelatedWork W2052892784 @default.
- W2121036149 hasRelatedWork W2059584525 @default.
- W2121036149 hasRelatedWork W2346707445 @default.
- W2121036149 hasRelatedWork W2533544427 @default.
- W2121036149 hasRelatedWork W2094763780 @default.
- W2121036149 isParatext "false" @default.
- W2121036149 isRetracted "false" @default.
- W2121036149 magId "2121036149" @default.
- W2121036149 workType "article" @default.