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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2121585532> ?p ?o ?g. }

• W2121585532 endingPage "1101405" @default.
• W2121585532 startingPage "1101405" @default.
• W2121585532 abstract "Ultrathin dielectric tunneling barriers are critical to Josephson junction (JJ) based superconducting quantum bits (qubits). However, the prevailing technique of thermally oxidizing aluminum via oxygen diffusion produces problematic defects, such as oxygen vacancies, which are believed to be a primary source of the two-level fluctuators and contribute to the decoherence of the qubits. Development of alternative approaches for improved tunneling barriers becomes urgent and imperative. Atomic Layer Deposition (ALD) of aluminum oxide (Al2O3) is a promising alternative to resolve the issue of oxygen vacancies in the Al2O3 tunneling barrier, and its self-limiting growth mechanism provides atomic-scale precision in tunneling barrier thickness control. A critical issue in ALD of Al2O3 on metals is the lack of hydroxyl groups on metal surface, which prevents nucleation of the trimethylaluminum (TMA). In this work, we explore modifications of the aluminum surface with water pulse exposures followed by TMA pulse exposures to assess the feasibility of ALD as a viable technique for JJ qubits. ALD Al2O3 films from 40 angstroms to 100 angstoms were grown on 1.4 angstroms to 500 angstroms of Al and were characterized with ellipsometry and atomic force microscopy. A growth rate of 1.2 angstroms/cycle was measured, and an interfacial layer (IL) was observed. Since the IL thickness depends on the availability of Al and saturated at 2 nm, choosing ultrathin Al wetting layers may lead to ultrathin ALD Al2O3 tunneling barriers." @default.
• W2121585532 created "2016-06-24" @default.
• W2121585532 creator A5013837255 @default.
• W2121585532 creator A5036068336 @default.
• W2121585532 creator A5039943021 @default.
• W2121585532 creator A5040349125 @default.
• W2121585532 creator A5065656683 @default.
• W2121585532 creator A5076455505 @default.
• W2121585532 creator A5090335255 @default.
• W2121585532 creator A5079643884 @default.
• W2121585532 date "2013-06-01" @default.
• W2121585532 modified "2023-10-16" @default.
• W2121585532 title "Probing the Nucleation of $hbox{Al}_{2}hbox{O}_{3}$ in Atomic Layer Deposition on Aluminum for Ultrathin Tunneling Barriers in Josephson Junctions" @default.
• W2121585532 cites W180510765 @default.
• W2121585532 cites W1978389691 @default.
• W2121585532 cites W1996962917 @default.
• W2121585532 cites W2000399637 @default.
• W2121585532 cites W2001690174 @default.
• W2121585532 cites W2010170553 @default.
• W2121585532 cites W2014868704 @default.
• W2121585532 cites W2035415368 @default.
• W2121585532 cites W2036600128 @default.
• W2121585532 cites W2051750832 @default.
• W2121585532 cites W2060106993 @default.
• W2121585532 cites W2063070257 @default.
• W2121585532 cites W2118250331 @default.
• W2121585532 cites W2156004788 @default.
• W2121585532 cites W2158932701 @default.
• W2121585532 cites W2164950842 @default.
• W2121585532 cites W2199597889 @default.
• W2121585532 doi "https://doi.org/10.1109/tasc.2013.2247452" @default.
• W2121585532 hasPublicationYear "2013" @default.
• W2121585532 type Work @default.
• W2121585532 sameAs 2121585532 @default.
• W2121585532 citedByCount "20" @default.
• W2121585532 countsByYear W21215855322014 @default.
• W2121585532 countsByYear W21215855322015 @default.
• W2121585532 countsByYear W21215855322016 @default.
• W2121585532 countsByYear W21215855322017 @default.
• W2121585532 countsByYear W21215855322018 @default.
• W2121585532 countsByYear W21215855322019 @default.
• W2121585532 countsByYear W21215855322020 @default.
• W2121585532 crossrefType "journal-article" @default.
• W2121585532 hasAuthorship W2121585532A5013837255 @default.
• W2121585532 hasAuthorship W2121585532A5036068336 @default.
• W2121585532 hasAuthorship W2121585532A5039943021 @default.
• W2121585532 hasAuthorship W2121585532A5040349125 @default.
• W2121585532 hasAuthorship W2121585532A5065656683 @default.
• W2121585532 hasAuthorship W2121585532A5076455505 @default.
• W2121585532 hasAuthorship W2121585532A5079643884 @default.
• W2121585532 hasAuthorship W2121585532A5090335255 @default.
• W2121585532 hasBestOaLocation W21215855322 @default.
• W2121585532 hasConcept C12038964 @default.
• W2121585532 hasConcept C120398109 @default.
• W2121585532 hasConcept C121332964 @default.
• W2121585532 hasConcept C159467904 @default.
• W2121585532 hasConcept C171250308 @default.
• W2121585532 hasConcept C178790620 @default.
• W2121585532 hasConcept C185592680 @default.
• W2121585532 hasConcept C192562407 @default.
• W2121585532 hasConcept C26873012 @default.
• W2121585532 hasConcept C2779227376 @default.
• W2121585532 hasConcept C49040817 @default.
• W2121585532 hasConcept C54101563 @default.
• W2121585532 hasConcept C61048295 @default.
• W2121585532 hasConcept C69544855 @default.
• W2121585532 hasConceptScore W2121585532C12038964 @default.
• W2121585532 hasConceptScore W2121585532C120398109 @default.
• W2121585532 hasConceptScore W2121585532C121332964 @default.
• W2121585532 hasConceptScore W2121585532C159467904 @default.
• W2121585532 hasConceptScore W2121585532C171250308 @default.
• W2121585532 hasConceptScore W2121585532C178790620 @default.
• W2121585532 hasConceptScore W2121585532C185592680 @default.
• W2121585532 hasConceptScore W2121585532C192562407 @default.
• W2121585532 hasConceptScore W2121585532C26873012 @default.
• W2121585532 hasConceptScore W2121585532C2779227376 @default.
• W2121585532 hasConceptScore W2121585532C49040817 @default.
• W2121585532 hasConceptScore W2121585532C54101563 @default.
• W2121585532 hasConceptScore W2121585532C61048295 @default.
• W2121585532 hasConceptScore W2121585532C69544855 @default.
• W2121585532 hasIssue "3" @default.
• W2121585532 hasLocation W21215855321 @default.
• W2121585532 hasLocation W21215855322 @default.
• W2121585532 hasOpenAccess W2121585532 @default.
• W2121585532 hasPrimaryLocation W21215855321 @default.
• W2121585532 hasRelatedWork W1981644999 @default.
• W2121585532 hasRelatedWork W1998534931 @default.
• W2121585532 hasRelatedWork W2014598323 @default.
• W2121585532 hasRelatedWork W2017189043 @default.
• W2121585532 hasRelatedWork W2028203501 @default.
• W2121585532 hasRelatedWork W2045648267 @default.
• W2121585532 hasRelatedWork W2067018196 @default.
• W2121585532 hasRelatedWork W2949072884 @default.
• W2121585532 hasRelatedWork W4248115860 @default.
• W2121585532 hasRelatedWork W4313886759 @default.
• W2121585532 hasVolume "23" @default.
• W2121585532 isParatext "false" @default.
• W2121585532 isRetracted "false" @default.

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