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- W2121592023 abstract "This paper describes the first laboratory EUV ellipsometer developed with the multilayer polarization elements installed in the optical path of our EUV reflectometer, and also some examples of ellipsometry and polarimetry measurements." @default.
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- W2121592023 date "2002-11-23" @default.
- W2121592023 modified "2023-09-26" @default.
- W2121592023 title "EUV laboratory polarimetry and ellipsometry with a laser produced plasma source" @default.
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- W2121592023 doi "https://doi.org/10.1109/leos.1997.630540" @default.
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