Matches in SemOpenAlex for { <https://semopenalex.org/work/W2122072014> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2122072014 endingPage "2345" @default.
- W2122072014 startingPage "2339" @default.
- W2122072014 abstract "Realizing photolithography on three-dimensional structures is useful for micromachining; however, a thin and uniform resist film is difficult to prepare on a non-planar sample. A spray coating technique has the potential to deposit a uniform and defect-free resist film on a three-dimensional structure. In this study, the characteristics of spray coating are examined focusing on spray flow speed. Faster spray flow is found to remove the pinhole defects even at the bottom of a deep cavity with a high aspect ratio. The results of patterning performance on a deep three-dimensional structure are also shown. A line-and-space pattern on a 200 µm deep groove is demonstrated to have thick and thin resist coverage at the convex and concave corners, respectively with no pinhole defects. The obtained results of the spray coated resist film are discussed based on the fluid dynamics." @default.
- W2122072014 created "2016-06-24" @default.
- W2122072014 creator A5005534311 @default.
- W2122072014 creator A5015217042 @default.
- W2122072014 creator A5050031455 @default.
- W2122072014 creator A5059064124 @default.
- W2122072014 creator A5060173388 @default.
- W2122072014 creator A5062604463 @default.
- W2122072014 creator A5068549097 @default.
- W2122072014 date "2005-11-14" @default.
- W2122072014 modified "2023-09-26" @default.
- W2122072014 title "Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating" @default.
- W2122072014 cites W1963975924 @default.
- W2122072014 cites W2008051929 @default.
- W2122072014 cites W2028984857 @default.
- W2122072014 cites W2029131610 @default.
- W2122072014 cites W2035087588 @default.
- W2122072014 cites W2043429143 @default.
- W2122072014 cites W2059416947 @default.
- W2122072014 cites W2067529880 @default.
- W2122072014 cites W2069292169 @default.
- W2122072014 cites W2077238890 @default.
- W2122072014 cites W2091914160 @default.
- W2122072014 cites W2092825543 @default.
- W2122072014 cites W2099788390 @default.
- W2122072014 cites W2107253220 @default.
- W2122072014 cites W2126115423 @default.
- W2122072014 cites W2147327102 @default.
- W2122072014 cites W2171677346 @default.
- W2122072014 cites W2587647094 @default.
- W2122072014 cites W4244324808 @default.
- W2122072014 doi "https://doi.org/10.1088/0960-1317/15/12/016" @default.
- W2122072014 hasPublicationYear "2005" @default.
- W2122072014 type Work @default.
- W2122072014 sameAs 2122072014 @default.
- W2122072014 citedByCount "32" @default.
- W2122072014 countsByYear W21220720142012 @default.
- W2122072014 countsByYear W21220720142013 @default.
- W2122072014 countsByYear W21220720142014 @default.
- W2122072014 countsByYear W21220720142015 @default.
- W2122072014 countsByYear W21220720142016 @default.
- W2122072014 countsByYear W21220720142017 @default.
- W2122072014 crossrefType "journal-article" @default.
- W2122072014 hasAuthorship W2122072014A5005534311 @default.
- W2122072014 hasAuthorship W2122072014A5015217042 @default.
- W2122072014 hasAuthorship W2122072014A5050031455 @default.
- W2122072014 hasAuthorship W2122072014A5059064124 @default.
- W2122072014 hasAuthorship W2122072014A5060173388 @default.
- W2122072014 hasAuthorship W2122072014A5062604463 @default.
- W2122072014 hasAuthorship W2122072014A5068549097 @default.
- W2122072014 hasConcept C121332964 @default.
- W2122072014 hasConcept C127313418 @default.
- W2122072014 hasConcept C134406635 @default.
- W2122072014 hasConcept C151730666 @default.
- W2122072014 hasConcept C159985019 @default.
- W2122072014 hasConcept C171250308 @default.
- W2122072014 hasConcept C19067145 @default.
- W2122072014 hasConcept C192562407 @default.
- W2122072014 hasConcept C2779227376 @default.
- W2122072014 hasConcept C2781448156 @default.
- W2122072014 hasConcept C2816523 @default.
- W2122072014 hasConcept C38349280 @default.
- W2122072014 hasConcept C57879066 @default.
- W2122072014 hasConcept C64297162 @default.
- W2122072014 hasConceptScore W2122072014C121332964 @default.
- W2122072014 hasConceptScore W2122072014C127313418 @default.
- W2122072014 hasConceptScore W2122072014C134406635 @default.
- W2122072014 hasConceptScore W2122072014C151730666 @default.
- W2122072014 hasConceptScore W2122072014C159985019 @default.
- W2122072014 hasConceptScore W2122072014C171250308 @default.
- W2122072014 hasConceptScore W2122072014C19067145 @default.
- W2122072014 hasConceptScore W2122072014C192562407 @default.
- W2122072014 hasConceptScore W2122072014C2779227376 @default.
- W2122072014 hasConceptScore W2122072014C2781448156 @default.
- W2122072014 hasConceptScore W2122072014C2816523 @default.
- W2122072014 hasConceptScore W2122072014C38349280 @default.
- W2122072014 hasConceptScore W2122072014C57879066 @default.
- W2122072014 hasConceptScore W2122072014C64297162 @default.
- W2122072014 hasIssue "12" @default.
- W2122072014 hasLocation W21220720141 @default.
- W2122072014 hasOpenAccess W2122072014 @default.
- W2122072014 hasPrimaryLocation W21220720141 @default.
- W2122072014 hasRelatedWork W2039653055 @default.
- W2122072014 hasRelatedWork W2051270029 @default.
- W2122072014 hasRelatedWork W2082293200 @default.
- W2122072014 hasRelatedWork W2137307547 @default.
- W2122072014 hasRelatedWork W2380293314 @default.
- W2122072014 hasRelatedWork W2943188944 @default.
- W2122072014 hasRelatedWork W3008690834 @default.
- W2122072014 hasRelatedWork W3082440218 @default.
- W2122072014 hasRelatedWork W4242480814 @default.
- W2122072014 hasRelatedWork W4285802202 @default.
- W2122072014 hasVolume "15" @default.
- W2122072014 isParatext "false" @default.
- W2122072014 isRetracted "false" @default.
- W2122072014 magId "2122072014" @default.
- W2122072014 workType "article" @default.