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- W2122206637 abstract "We demonstrate a side-diffraction interferometric method for characterization of transmission diffraction gratings on substrates with nonflat surfaces. Our method measures the interferometric pattern between the coherent zeroth-order and first-order transmission beams and allows simultaneous characterization of both the grating period variation and the substrate thickness variation." @default.
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- W2122206637 date "2004-10-01" @default.
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- W2122206637 title "Interferometric Characterization of Nonflat Transmission Diffraction Gratings" @default.
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- W2122206637 doi "https://doi.org/10.1109/lpt.2004.833873" @default.
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