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- W2122502010 abstract "Using a new, double-sided adhesive process, an analog tunable capacitor has been designed and fabricated with an extremely large tuning range and a high Q. New design components such as two-sided metal deposition, low resistivity silicon, thicker device layers, and double beam suspensions have improved RF performance drastically. In the 200-400 MHz range that this device is intended for, Q values are in excess of 100. In addition, an 8.4 to 1 tuning ratio has been achieved with continuous tuning over a 1.4 to 11.9 pF range. To further improve dynamic performance, devices were operated in a high viscosity gas environment and near critical damping was achieved." @default.
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- W2122502010 date "2003-06-25" @default.
- W2122502010 modified "2023-09-27" @default.
- W2122502010 title "A high Q, large tuning range, tunable capacitor for RF applications" @default.
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- W2122502010 doi "https://doi.org/10.1109/memsys.2002.984359" @default.
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