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• W2122644112 abstract "This paper extends the range of applications for microwave energy to create a plasma source based on the resonance phenomenon and operated at atmospheric pressure. The atmospheric-pressure process is advantageous for plasma-assisted coating deposition and plasma surface treatment. The novel Microwave Resonance Plasma Torch (MRPT) using the tunable TM/sub 013/ mode cylindrical resonant cavity and working at 2.45 GHz was tested for surface engineering applications. The MRPT was successfully approved with different carrier gases (N/sub 2/, Ar, He) for creation of thermal plasma. The feasibility of using the Microwave Resonance Plasma Torch for nitriding/oxinitriding of Ti, 304 and 316 stainless steel, and 5140 steel with pure N/sub 2/ and with air (the mixture of N/sub 2/ 78 vol%+O/sub 2/ 21 vol%) was confirmed." @default.
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• W2122644112 date "2002-11-13" @default.
• W2122644112 modified "2023-09-27" @default.
• W2122644112 title "Microwave resonance plasma source for surface modification technologies at atmospheric pressure" @default.
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• W2122644112 doi "https://doi.org/10.1109/apmc.2001.985487" @default.
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