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- W2123133069 abstract "This paper shows that hot H3PO4 is a suitable etchant for the production of dislocation etch pits on {001}-InP, (InGa)P, GaP, Ga(AsP), and {111}-GaP. The effects upon etch pit morphology of the misorientation of samples and the type of dislocations are investigated in detail. In dieser Arbeit wird gezeigt, daß heiße H3PO4 ein geeignetes Ätzmittel zur Erzeugung von Versetzungsätzgruben auf {001}-InP, (GaIn)P, GaP, Ga(AsP) und {111}-GaP ist. Der Einfluß der Fehlorientierung der Proben und des Types der Versetzung auf die Ätzgrubenmorphologie wird untersucht." @default.
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- W2123133069 date "1979-01-01" @default.
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- W2123133069 title "H3PO4 — etching of {001}-faces of InP, (GaIn)P, GaP, and Ga(AsP)" @default.
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- W2123133069 doi "https://doi.org/10.1002/crat.19790140509" @default.
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