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- W2123146579 abstract "This paper reports the design and fabrication of T-shape vector hydrophone based on MEMS inspired by fish lateral line. Based on the analysis of mechanical properties of T-beam, the design and fabrication process of microstructure are described in detail, and then the characteristics of the microstructure are analyzed by the ANSYS. The first-order resonance frequency is 1970Hz, and the position of the piezoresistor is away from edges about 120µm. The microstructure is manufactured by means of the silicon-on-insulator (SOI) craft. The test results show that hydrophone's receiving sensitivity is up to −180dB (0dB = 1V/µPa), displaying a clear directivity pattern in the form of “8” shape." @default.
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- W2123146579 date "2011-06-01" @default.
- W2123146579 modified "2023-09-23" @default.
- W2123146579 title "Design of T-shape vector hydrophone based on MEMS" @default.
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- W2123146579 doi "https://doi.org/10.1109/transducers.2011.5969121" @default.
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