Matches in SemOpenAlex for { <https://semopenalex.org/work/W2123371629> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2123371629 abstract "We report a novel bulk micromachining method for the fabrication of high aspect ratio monocrystalline silicon MicroElectroMechanical Systems (MEMS) on a standard silicon wafer. The two-mask process combines double-side etching and metallization to create a micromechanical system with 'insulating walls' on its backside. The insulating walls ensure a proper electrical insulation between the different actuation and sensing elements situated on either fixed or movable parts of the device. To demonstrate the many potential applications of this simple microfabrication method, we have machined and characterized electrostatically actuated microtweezers with an integrated differential capacitive sensor." @default.
- W2123371629 created "2016-06-24" @default.
- W2123371629 creator A5026176568 @default.
- W2123371629 creator A5037980867 @default.
- W2123371629 creator A5053401940 @default.
- W2123371629 creator A5061605675 @default.
- W2123371629 creator A5073676276 @default.
- W2123371629 date "2008-01-01" @default.
- W2123371629 modified "2023-10-04" @default.
- W2123371629 title "HAREM: High aspect ratio etching and metallization" @default.
- W2123371629 cites W1971318743 @default.
- W2123371629 cites W2023362441 @default.
- W2123371629 cites W2069651801 @default.
- W2123371629 cites W2097977675 @default.
- W2123371629 cites W2110092937 @default.
- W2123371629 cites W2112535567 @default.
- W2123371629 cites W2122982254 @default.
- W2123371629 cites W2129247804 @default.
- W2123371629 cites W2169974464 @default.
- W2123371629 doi "https://doi.org/10.1109/memsys.2008.4443656" @default.
- W2123371629 hasPublicationYear "2008" @default.
- W2123371629 type Work @default.
- W2123371629 sameAs 2123371629 @default.
- W2123371629 citedByCount "0" @default.
- W2123371629 crossrefType "proceedings-article" @default.
- W2123371629 hasAuthorship W2123371629A5026176568 @default.
- W2123371629 hasAuthorship W2123371629A5037980867 @default.
- W2123371629 hasAuthorship W2123371629A5053401940 @default.
- W2123371629 hasAuthorship W2123371629A5061605675 @default.
- W2123371629 hasAuthorship W2123371629A5073676276 @default.
- W2123371629 hasConcept C100460472 @default.
- W2123371629 hasConcept C119599485 @default.
- W2123371629 hasConcept C127413603 @default.
- W2123371629 hasConcept C136525101 @default.
- W2123371629 hasConcept C142724271 @default.
- W2123371629 hasConcept C145667562 @default.
- W2123371629 hasConcept C160671074 @default.
- W2123371629 hasConcept C171250308 @default.
- W2123371629 hasConcept C192562407 @default.
- W2123371629 hasConcept C204787440 @default.
- W2123371629 hasConcept C206755178 @default.
- W2123371629 hasConcept C26953177 @default.
- W2123371629 hasConcept C2779227376 @default.
- W2123371629 hasConcept C37977207 @default.
- W2123371629 hasConcept C41075158 @default.
- W2123371629 hasConcept C49040817 @default.
- W2123371629 hasConcept C527607 @default.
- W2123371629 hasConcept C544956773 @default.
- W2123371629 hasConcept C71924100 @default.
- W2123371629 hasConcept C82558694 @default.
- W2123371629 hasConceptScore W2123371629C100460472 @default.
- W2123371629 hasConceptScore W2123371629C119599485 @default.
- W2123371629 hasConceptScore W2123371629C127413603 @default.
- W2123371629 hasConceptScore W2123371629C136525101 @default.
- W2123371629 hasConceptScore W2123371629C142724271 @default.
- W2123371629 hasConceptScore W2123371629C145667562 @default.
- W2123371629 hasConceptScore W2123371629C160671074 @default.
- W2123371629 hasConceptScore W2123371629C171250308 @default.
- W2123371629 hasConceptScore W2123371629C192562407 @default.
- W2123371629 hasConceptScore W2123371629C204787440 @default.
- W2123371629 hasConceptScore W2123371629C206755178 @default.
- W2123371629 hasConceptScore W2123371629C26953177 @default.
- W2123371629 hasConceptScore W2123371629C2779227376 @default.
- W2123371629 hasConceptScore W2123371629C37977207 @default.
- W2123371629 hasConceptScore W2123371629C41075158 @default.
- W2123371629 hasConceptScore W2123371629C49040817 @default.
- W2123371629 hasConceptScore W2123371629C527607 @default.
- W2123371629 hasConceptScore W2123371629C544956773 @default.
- W2123371629 hasConceptScore W2123371629C71924100 @default.
- W2123371629 hasConceptScore W2123371629C82558694 @default.
- W2123371629 hasLocation W21233716291 @default.
- W2123371629 hasOpenAccess W2123371629 @default.
- W2123371629 hasPrimaryLocation W21233716291 @default.
- W2123371629 hasRelatedWork W2077666430 @default.
- W2123371629 hasRelatedWork W2080198748 @default.
- W2123371629 hasRelatedWork W2095423796 @default.
- W2123371629 hasRelatedWork W2148523941 @default.
- W2123371629 hasRelatedWork W2399397734 @default.
- W2123371629 hasRelatedWork W2515483758 @default.
- W2123371629 hasRelatedWork W2802661632 @default.
- W2123371629 hasRelatedWork W2901189866 @default.
- W2123371629 hasRelatedWork W3147595904 @default.
- W2123371629 hasRelatedWork W4296250578 @default.
- W2123371629 isParatext "false" @default.
- W2123371629 isRetracted "false" @default.
- W2123371629 magId "2123371629" @default.
- W2123371629 workType "article" @default.