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- W2123383467 abstract "Fully functional 512Kb static-random access memory (SRAM) devices containing more than 3.6 million transistors have been successfully fabricated in a 0.25 μm complementary metal oxide semiconductor (CMOS) technology using compact storage ring X-ray lithography thus demonstrating the functionality of the X-ray lithography infrastructure. A lithographic performance comparison was made between x-ray lithography and optical (excimer laser) lithography by fabricating SRAM devices using both lithographic techniques. The excellent process latitude and dimension control available for x-ray lithography is reflected in this comparison. A comprehensive discussion of the advantages of x-ray lithography is discussed in this paper." @default.
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- W2123383467 date "1994-01-01" @default.
- W2123383467 modified "2023-09-30" @default.
- W2123383467 title "Fabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography" @default.
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- W2123383467 doi "https://doi.org/10.1016/0167-9317(94)90148-1" @default.
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