Matches in SemOpenAlex for { <https://semopenalex.org/work/W2123453889> ?p ?o ?g. }
- W2123453889 endingPage "298" @default.
- W2123453889 startingPage "277" @default.
- W2123453889 abstract "Experimental studies on aluminum (Al) and boron (B) implantation in 4H/6H SiC are reported; the implantation is conducted at room temperature or elevated temperatures (500 to 700 °C). Both Al and B act as “shallow” acceptors in SiC. The ionization energy of these acceptors, the hole mobility and the compensation in the implanted layers are obtained from Hall effect investigations. The degree of electrical activity of implanted Al/B atoms is determined as a function of the annealing temperature. Energetically deep centers introduced by the Al+/B+ implantation are investigated. The redistribution of implanted Al/B atoms subsequent to anneals and extended lattice defects are monitored. The generation of the B-related D-center is studied by coimplantation of Si/B and C/B, respectively." @default.
- W2123453889 created "2016-06-24" @default.
- W2123453889 creator A5022205092 @default.
- W2123453889 creator A5045783072 @default.
- W2123453889 creator A5048260349 @default.
- W2123453889 creator A5050208027 @default.
- W2123453889 creator A5056991169 @default.
- W2123453889 creator A5066020971 @default.
- W2123453889 creator A5075181733 @default.
- W2123453889 creator A5081956074 @default.
- W2123453889 date "1997-07-01" @default.
- W2123453889 modified "2023-10-14" @default.
- W2123453889 title "Doping of SiC by Implantation of Boron and Aluminum" @default.
- W2123453889 cites W104127606 @default.
- W2123453889 cites W1965229572 @default.
- W2123453889 cites W1974084099 @default.
- W2123453889 cites W1976511783 @default.
- W2123453889 cites W1984949964 @default.
- W2123453889 cites W1990577556 @default.
- W2123453889 cites W1991820022 @default.
- W2123453889 cites W1992296929 @default.
- W2123453889 cites W1993087497 @default.
- W2123453889 cites W1994366487 @default.
- W2123453889 cites W1996800024 @default.
- W2123453889 cites W2008568176 @default.
- W2123453889 cites W2011253870 @default.
- W2123453889 cites W2016986870 @default.
- W2123453889 cites W2018145230 @default.
- W2123453889 cites W2018343320 @default.
- W2123453889 cites W2020068761 @default.
- W2123453889 cites W2020397646 @default.
- W2123453889 cites W2023643382 @default.
- W2123453889 cites W2031264725 @default.
- W2123453889 cites W2035929188 @default.
- W2123453889 cites W2039070639 @default.
- W2123453889 cites W2043354845 @default.
- W2123453889 cites W2049870747 @default.
- W2123453889 cites W2052204421 @default.
- W2123453889 cites W2064958620 @default.
- W2123453889 cites W2071726292 @default.
- W2123453889 cites W2080605223 @default.
- W2123453889 cites W2087975084 @default.
- W2123453889 cites W2115774002 @default.
- W2123453889 cites W2124617760 @default.
- W2123453889 cites W2168579821 @default.
- W2123453889 doi "https://doi.org/10.1002/1521-396x(199707)162:1<277::aid-pssa277>3.0.co;2-c" @default.
- W2123453889 hasPublicationYear "1997" @default.
- W2123453889 type Work @default.
- W2123453889 sameAs 2123453889 @default.
- W2123453889 citedByCount "228" @default.
- W2123453889 countsByYear W21234538892012 @default.
- W2123453889 countsByYear W21234538892013 @default.
- W2123453889 countsByYear W21234538892014 @default.
- W2123453889 countsByYear W21234538892015 @default.
- W2123453889 countsByYear W21234538892016 @default.
- W2123453889 countsByYear W21234538892017 @default.
- W2123453889 countsByYear W21234538892018 @default.
- W2123453889 countsByYear W21234538892019 @default.
- W2123453889 countsByYear W21234538892020 @default.
- W2123453889 countsByYear W21234538892021 @default.
- W2123453889 countsByYear W21234538892022 @default.
- W2123453889 countsByYear W21234538892023 @default.
- W2123453889 crossrefType "journal-article" @default.
- W2123453889 hasAuthorship W2123453889A5022205092 @default.
- W2123453889 hasAuthorship W2123453889A5045783072 @default.
- W2123453889 hasAuthorship W2123453889A5048260349 @default.
- W2123453889 hasAuthorship W2123453889A5050208027 @default.
- W2123453889 hasAuthorship W2123453889A5056991169 @default.
- W2123453889 hasAuthorship W2123453889A5066020971 @default.
- W2123453889 hasAuthorship W2123453889A5075181733 @default.
- W2123453889 hasAuthorship W2123453889A5081956074 @default.
- W2123453889 hasConcept C106782819 @default.
- W2123453889 hasConcept C113196181 @default.
- W2123453889 hasConcept C119599485 @default.
- W2123453889 hasConcept C121332964 @default.
- W2123453889 hasConcept C127413603 @default.
- W2123453889 hasConcept C134112204 @default.
- W2123453889 hasConcept C145148216 @default.
- W2123453889 hasConcept C17744445 @default.
- W2123453889 hasConcept C178790620 @default.
- W2123453889 hasConcept C185592680 @default.
- W2123453889 hasConcept C191897082 @default.
- W2123453889 hasConcept C192562407 @default.
- W2123453889 hasConcept C199539241 @default.
- W2123453889 hasConcept C26873012 @default.
- W2123453889 hasConcept C2777855556 @default.
- W2123453889 hasConcept C2779892579 @default.
- W2123453889 hasConcept C2780304102 @default.
- W2123453889 hasConcept C41823505 @default.
- W2123453889 hasConcept C43617362 @default.
- W2123453889 hasConcept C49040817 @default.
- W2123453889 hasConcept C501308230 @default.
- W2123453889 hasConcept C513153333 @default.
- W2123453889 hasConcept C57863236 @default.
- W2123453889 hasConcept C69990965 @default.
- W2123453889 hasConcept C74080474 @default.
- W2123453889 hasConcept C94625758 @default.
- W2123453889 hasConceptScore W2123453889C106782819 @default.