Matches in SemOpenAlex for { <https://semopenalex.org/work/W2123702951> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2123702951 endingPage "011004" @default.
- W2123702951 startingPage "011004" @default.
- W2123702951 abstract "The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry." @default.
- W2123702951 created "2016-06-24" @default.
- W2123702951 creator A5006942741 @default.
- W2123702951 creator A5061026536 @default.
- W2123702951 creator A5066201670 @default.
- W2123702951 creator A5069137826 @default.
- W2123702951 creator A5088168579 @default.
- W2123702951 date "2009-01-01" @default.
- W2123702951 modified "2023-10-16" @default.
- W2123702951 title "Mask characterization for double patterning lithography" @default.
- W2123702951 cites W1967800214 @default.
- W2123702951 cites W1969786523 @default.
- W2123702951 cites W2017820380 @default.
- W2123702951 cites W2021311077 @default.
- W2123702951 cites W2029632467 @default.
- W2123702951 cites W2034006444 @default.
- W2123702951 cites W2058612246 @default.
- W2123702951 cites W2061297787 @default.
- W2123702951 cites W2066891900 @default.
- W2123702951 cites W2129263513 @default.
- W2123702951 doi "https://doi.org/10.1117/1.3023078" @default.
- W2123702951 hasPublicationYear "2009" @default.
- W2123702951 type Work @default.
- W2123702951 sameAs 2123702951 @default.
- W2123702951 citedByCount "7" @default.
- W2123702951 countsByYear W21237029512012 @default.
- W2123702951 countsByYear W21237029512014 @default.
- W2123702951 countsByYear W21237029512016 @default.
- W2123702951 countsByYear W21237029512021 @default.
- W2123702951 crossrefType "journal-article" @default.
- W2123702951 hasAuthorship W2123702951A5006942741 @default.
- W2123702951 hasAuthorship W2123702951A5061026536 @default.
- W2123702951 hasAuthorship W2123702951A5066201670 @default.
- W2123702951 hasAuthorship W2123702951A5069137826 @default.
- W2123702951 hasAuthorship W2123702951A5088168579 @default.
- W2123702951 hasConcept C162996421 @default.
- W2123702951 hasConcept C163581340 @default.
- W2123702951 hasConcept C171250308 @default.
- W2123702951 hasConcept C177409738 @default.
- W2123702951 hasConcept C192562407 @default.
- W2123702951 hasConcept C200274948 @default.
- W2123702951 hasConcept C204223013 @default.
- W2123702951 hasConcept C2779227376 @default.
- W2123702951 hasConcept C2780841128 @default.
- W2123702951 hasConcept C49040817 @default.
- W2123702951 hasConcept C53524968 @default.
- W2123702951 hasConceptScore W2123702951C162996421 @default.
- W2123702951 hasConceptScore W2123702951C163581340 @default.
- W2123702951 hasConceptScore W2123702951C171250308 @default.
- W2123702951 hasConceptScore W2123702951C177409738 @default.
- W2123702951 hasConceptScore W2123702951C192562407 @default.
- W2123702951 hasConceptScore W2123702951C200274948 @default.
- W2123702951 hasConceptScore W2123702951C204223013 @default.
- W2123702951 hasConceptScore W2123702951C2779227376 @default.
- W2123702951 hasConceptScore W2123702951C2780841128 @default.
- W2123702951 hasConceptScore W2123702951C49040817 @default.
- W2123702951 hasConceptScore W2123702951C53524968 @default.
- W2123702951 hasIssue "1" @default.
- W2123702951 hasLocation W21237029511 @default.
- W2123702951 hasOpenAccess W2123702951 @default.
- W2123702951 hasPrimaryLocation W21237029511 @default.
- W2123702951 hasRelatedWork W1967752359 @default.
- W2123702951 hasRelatedWork W1991236041 @default.
- W2123702951 hasRelatedWork W2054486439 @default.
- W2123702951 hasRelatedWork W2062836254 @default.
- W2123702951 hasRelatedWork W2115795789 @default.
- W2123702951 hasRelatedWork W2140942945 @default.
- W2123702951 hasRelatedWork W2541440459 @default.
- W2123702951 hasRelatedWork W2971086886 @default.
- W2123702951 hasRelatedWork W3194248482 @default.
- W2123702951 hasRelatedWork W3217260345 @default.
- W2123702951 hasVolume "8" @default.
- W2123702951 isParatext "false" @default.
- W2123702951 isRetracted "false" @default.
- W2123702951 magId "2123702951" @default.
- W2123702951 workType "article" @default.