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• W2123938920 abstract "Low loss, single mode rib waveguides, based on PECVD deposited multi-layer amorphous silicon are fabricated. These waveguide are refractive index and mode-matched to III/V laser waveguides. Methods for monolithic integration of these passive amorphous silicon waveguides with InGaAsP/InP gain sections are demonstrated. Results of a multi-wavelength laser based on an amorphous silicon arrayed waveguide grating integrated on a single chip with InGaAsP gain sections are presented." @default.
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• W2123938920 date "2006-09-22" @default.
• W2123938920 modified "2023-09-26" @default.
• W2123938920 title "Amorphous silicon waveguide components for monolithic integration with InGaAsP gain sections" @default.
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• W2123938920 doi "https://doi.org/10.1117/12.691710" @default.
• W2123938920 hasPublicationYear "2006" @default.
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