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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2123997404> ?p ?o ?g. }

• W2123997404 endingPage "386" @default.
• W2123997404 startingPage "379" @default.
• W2123997404 abstract "A novel wafer-level fabrication technique for polymeric springs combined with a silicon proof mass is presented for applications in MEMS force sensors or scanning micromirrors. Furthermore, passive test structures for the determination of mechanical parameters of the polymer are integrated on the wafer during device fabrication. The test structures allow for chip scale process monitoring in respect to the material parameters. The large difference of material stiffness and thickness between the springs and the proof mass concentrates the entire mechanical deformation into the springs. Furthermore, the polymeric springs can be used as electrically isolated suspension for electrostatically levitated devices. Devices have been fabricated and characterized by means of frequency response analysis. Thereby, a polymeric suspension with a spring constant of 8.7 N/m is presented, while the suspended structure itself features a spring constant of 140 kN/m. Material properties of the spring material (SU-8 2025) were measured to be 2.45 ± 0.6 GPa, 27.2 ± 2.2 MPa and 13.8 ± 3.2 MPa/m, for Young's modulus, the residual stress and the residual stress gradient, respectively." @default.
• W2123997404 created "2016-06-24" @default.
• W2123997404 creator A5022565434 @default.
• W2123997404 creator A5037450803 @default.
• W2123997404 creator A5072426722 @default.
• W2123997404 creator A5074093090 @default.
• W2123997404 creator A5084015362 @default.
• W2123997404 date "2006-08-01" @default.
• W2123997404 modified "2023-10-10" @default.
• W2123997404 title "Fabrication and characterization of folded SU-8 suspensions for MEMS applications" @default.
• W2123997404 cites W1978629053 @default.
• W2123997404 cites W2007547222 @default.
• W2123997404 cites W2023923307 @default.
• W2123997404 cites W2059794679 @default.
• W2123997404 cites W2066874036 @default.
• W2123997404 cites W2082983861 @default.
• W2123997404 cites W2094652797 @default.
• W2123997404 cites W2106882865 @default.
• W2123997404 cites W2113512271 @default.
• W2123997404 cites W2116357047 @default.
• W2123997404 cites W2159584101 @default.
• W2123997404 doi "https://doi.org/10.1016/j.sna.2005.12.020" @default.
• W2123997404 hasPublicationYear "2006" @default.
• W2123997404 type Work @default.
• W2123997404 sameAs 2123997404 @default.
• W2123997404 citedByCount "53" @default.
• W2123997404 countsByYear W21239974042012 @default.
• W2123997404 countsByYear W21239974042013 @default.
• W2123997404 countsByYear W21239974042014 @default.
• W2123997404 countsByYear W21239974042015 @default.
• W2123997404 countsByYear W21239974042016 @default.
• W2123997404 countsByYear W21239974042019 @default.
• W2123997404 countsByYear W21239974042020 @default.
• W2123997404 countsByYear W21239974042021 @default.
• W2123997404 crossrefType "journal-article" @default.
• W2123997404 hasAuthorship W2123997404A5022565434 @default.
• W2123997404 hasAuthorship W2123997404A5037450803 @default.
• W2123997404 hasAuthorship W2123997404A5072426722 @default.
• W2123997404 hasAuthorship W2123997404A5074093090 @default.
• W2123997404 hasAuthorship W2123997404A5084015362 @default.
• W2123997404 hasConcept C105341887 @default.
• W2123997404 hasConcept C119599485 @default.
• W2123997404 hasConcept C127413603 @default.
• W2123997404 hasConcept C136525101 @default.
• W2123997404 hasConcept C142724271 @default.
• W2123997404 hasConcept C159985019 @default.
• W2123997404 hasConcept C160671074 @default.
• W2123997404 hasConcept C165005293 @default.
• W2123997404 hasConcept C171250308 @default.
• W2123997404 hasConcept C192562407 @default.
• W2123997404 hasConcept C193867417 @default.
• W2123997404 hasConcept C202444582 @default.
• W2123997404 hasConcept C204787440 @default.
• W2123997404 hasConcept C2778712887 @default.
• W2123997404 hasConcept C2779372316 @default.
• W2123997404 hasConcept C2780330379 @default.
• W2123997404 hasConcept C2780841128 @default.
• W2123997404 hasConcept C33923547 @default.
• W2123997404 hasConcept C37292000 @default.
• W2123997404 hasConcept C37977207 @default.
• W2123997404 hasConcept C49040817 @default.
• W2123997404 hasConcept C521977710 @default.
• W2123997404 hasConcept C5961521 @default.
• W2123997404 hasConcept C66938386 @default.
• W2123997404 hasConcept C71924100 @default.
• W2123997404 hasConceptScore W2123997404C105341887 @default.
• W2123997404 hasConceptScore W2123997404C119599485 @default.
• W2123997404 hasConceptScore W2123997404C127413603 @default.
• W2123997404 hasConceptScore W2123997404C136525101 @default.
• W2123997404 hasConceptScore W2123997404C142724271 @default.
• W2123997404 hasConceptScore W2123997404C159985019 @default.
• W2123997404 hasConceptScore W2123997404C160671074 @default.
• W2123997404 hasConceptScore W2123997404C165005293 @default.
• W2123997404 hasConceptScore W2123997404C171250308 @default.
• W2123997404 hasConceptScore W2123997404C192562407 @default.
• W2123997404 hasConceptScore W2123997404C193867417 @default.
• W2123997404 hasConceptScore W2123997404C202444582 @default.
• W2123997404 hasConceptScore W2123997404C204787440 @default.
• W2123997404 hasConceptScore W2123997404C2778712887 @default.
• W2123997404 hasConceptScore W2123997404C2779372316 @default.
• W2123997404 hasConceptScore W2123997404C2780330379 @default.
• W2123997404 hasConceptScore W2123997404C2780841128 @default.
• W2123997404 hasConceptScore W2123997404C33923547 @default.
• W2123997404 hasConceptScore W2123997404C37292000 @default.
• W2123997404 hasConceptScore W2123997404C37977207 @default.
• W2123997404 hasConceptScore W2123997404C49040817 @default.
• W2123997404 hasConceptScore W2123997404C521977710 @default.
• W2123997404 hasConceptScore W2123997404C5961521 @default.
• W2123997404 hasConceptScore W2123997404C66938386 @default.
• W2123997404 hasConceptScore W2123997404C71924100 @default.
• W2123997404 hasLocation W21239974041 @default.
• W2123997404 hasOpenAccess W2123997404 @default.
• W2123997404 hasPrimaryLocation W21239974041 @default.
• W2123997404 hasRelatedWork W1580201804 @default.
• W2123997404 hasRelatedWork W2020747132 @default.
• W2123997404 hasRelatedWork W2063778609 @default.
• W2123997404 hasRelatedWork W2123997404 @default.
• W2123997404 hasRelatedWork W2574443482 @default.

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