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• W2124251489 endingPage "1049" @default.
• W2124251489 startingPage "1042" @default.
• W2124251489 abstract "This paper describes a fabrication process that uses flash-lamp annealing (FLA) and the characteristics of the CMOS transistors that are constructed with an ultralow-thermal- budget process tuned for 45-nm metal/high-k FETs. FLA enhances the drivability of pFETs with the solid-phase epitaxial (SPE) extension junction, but reducing the thermal budget deteriorates the poly-gate depletion and the electron mobility. Metal gate, however, prevents the depletion problem and leads to higher drain currents and better threshold-voltage (V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>TH</sub> ) roll-offs when processed with tilted extension implantation combined with SPE + FLA than when processed with untilted extension implantation combined with spike rapid thermal annealing. Reducing the thermal budget is also effective in obtaining low V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>TH</sub> values in p-metal/HfSiON gate because of the reduced vacancy formation. Moreover, cluster-boron implantation for pFETs has superiority over monomer-boron implantation with Ge postamorphous implantation in terms of V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>TH</sub> roll-offs and I <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>on</sub> -I <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>off</sub> 's if FLA is used as activation. The superior electrical characteristics of full-metal- gate HfSiON transistors whose gate length is less than 50 nm, which are fabricated by using the FLA process, are demonstrated." @default.
• W2124251489 created "2016-06-24" @default.
• W2124251489 creator A5007260786 @default.
• W2124251489 creator A5012231389 @default.
• W2124251489 creator A5023355459 @default.
• W2124251489 creator A5037433690 @default.
• W2124251489 creator A5049886183 @default.
• W2124251489 creator A5050598012 @default.
• W2124251489 creator A5052117615 @default.
• W2124251489 creator A5058055702 @default.
• W2124251489 creator A5064156448 @default.
• W2124251489 creator A5077505445 @default.
• W2124251489 creator A5087955586 @default.
• W2124251489 date "2008-04-01" @default.
• W2124251489 modified "2023-10-14" @default.
• W2124251489 title "Ultralow-Thermal-Budget CMOS Process Using Flash-Lamp Annealing for 45 nm Metal/High- $k$ FETs" @default.
• W2124251489 cites W1510739873 @default.
• W2124251489 cites W1527128063 @default.
• W2124251489 cites W1587249792 @default.
• W2124251489 cites W1962226203 @default.
• W2124251489 cites W2029583293 @default.
• W2124251489 cites W2040559176 @default.
• W2124251489 cites W2054125093 @default.
• W2124251489 cites W2086468510 @default.
• W2124251489 cites W2099384622 @default.
• W2124251489 cites W2112344289 @default.
• W2124251489 cites W2114696505 @default.
• W2124251489 cites W2128070139 @default.
• W2124251489 cites W2128795533 @default.
• W2124251489 cites W2544582880 @default.
• W2124251489 cites W2158215445 @default.
• W2124251489 doi "https://doi.org/10.1109/ted.2008.917546" @default.
• W2124251489 hasPublicationYear "2008" @default.
• W2124251489 type Work @default.
• W2124251489 sameAs 2124251489 @default.
• W2124251489 citedByCount "15" @default.
• W2124251489 countsByYear W21242514892015 @default.
• W2124251489 countsByYear W21242514892016 @default.
• W2124251489 countsByYear W21242514892017 @default.
• W2124251489 countsByYear W21242514892019 @default.
• W2124251489 countsByYear W21242514892022 @default.
• W2124251489 crossrefType "journal-article" @default.
• W2124251489 hasAuthorship W2124251489A5007260786 @default.
• W2124251489 hasAuthorship W2124251489A5012231389 @default.
• W2124251489 hasAuthorship W2124251489A5023355459 @default.
• W2124251489 hasAuthorship W2124251489A5037433690 @default.
• W2124251489 hasAuthorship W2124251489A5049886183 @default.
• W2124251489 hasAuthorship W2124251489A5050598012 @default.
• W2124251489 hasAuthorship W2124251489A5052117615 @default.
• W2124251489 hasAuthorship W2124251489A5058055702 @default.
• W2124251489 hasAuthorship W2124251489A5064156448 @default.
• W2124251489 hasAuthorship W2124251489A5077505445 @default.
• W2124251489 hasAuthorship W2124251489A5087955586 @default.
• W2124251489 hasConcept C113196181 @default.
• W2124251489 hasConcept C119599485 @default.
• W2124251489 hasConcept C121332964 @default.
• W2124251489 hasConcept C127413603 @default.
• W2124251489 hasConcept C165801399 @default.
• W2124251489 hasConcept C172385210 @default.
• W2124251489 hasConcept C178790620 @default.
• W2124251489 hasConcept C185592680 @default.
• W2124251489 hasConcept C191897082 @default.
• W2124251489 hasConcept C192562407 @default.
• W2124251489 hasConcept C2777855556 @default.
• W2124251489 hasConcept C46362747 @default.
• W2124251489 hasConcept C49040817 @default.
• W2124251489 hasConcept C544153396 @default.
• W2124251489 hasConceptScore W2124251489C113196181 @default.
• W2124251489 hasConceptScore W2124251489C119599485 @default.
• W2124251489 hasConceptScore W2124251489C121332964 @default.
• W2124251489 hasConceptScore W2124251489C127413603 @default.
• W2124251489 hasConceptScore W2124251489C165801399 @default.
• W2124251489 hasConceptScore W2124251489C172385210 @default.
• W2124251489 hasConceptScore W2124251489C178790620 @default.
• W2124251489 hasConceptScore W2124251489C185592680 @default.
• W2124251489 hasConceptScore W2124251489C191897082 @default.
• W2124251489 hasConceptScore W2124251489C192562407 @default.
• W2124251489 hasConceptScore W2124251489C2777855556 @default.
• W2124251489 hasConceptScore W2124251489C46362747 @default.
• W2124251489 hasConceptScore W2124251489C49040817 @default.
• W2124251489 hasConceptScore W2124251489C544153396 @default.
• W2124251489 hasIssue "4" @default.
• W2124251489 hasLocation W21242514891 @default.
• W2124251489 hasOpenAccess W2124251489 @default.
• W2124251489 hasPrimaryLocation W21242514891 @default.
• W2124251489 hasRelatedWork W1481245673 @default.
• W2124251489 hasRelatedWork W1570166337 @default.
• W2124251489 hasRelatedWork W1964153648 @default.
• W2124251489 hasRelatedWork W2033741460 @default.
• W2124251489 hasRelatedWork W2117377230 @default.
• W2124251489 hasRelatedWork W2118243209 @default.
• W2124251489 hasRelatedWork W2206937489 @default.
• W2124251489 hasRelatedWork W2404179348 @default.
• W2124251489 hasRelatedWork W2789203801 @default.
• W2124251489 hasRelatedWork W2954104981 @default.
• W2124251489 hasVolume "55" @default.
• W2124251489 isParatext "false" @default.
• W2124251489 isRetracted "false" @default.

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