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- W2124283043 endingPage "062001" @default.
- W2124283043 startingPage "062001" @default.
- W2124283043 abstract "The control of the chemical state of the inner surfaces of nanocavities (NCs) produced by the annealing of helium-implanted silicon has influence on lifetime control, gettering and wafer bonding. In this work it is demonstrated that the etching in HFaq of (1 0 0) silicon containing a buried array of NCs produces a giant injection of hydrogen with the consequent passivation of the inner surfaces, mainly via the formation of silicon monohydride at (1 1 1) faces and monohydride dimers at 2 × 1 reconstructed (1 0 0) faces. These terminations are very stable and survive heat treatments at 700 °C." @default.
- W2124283043 created "2016-06-24" @default.
- W2124283043 creator A5032811107 @default.
- W2124283043 creator A5054110521 @default.
- W2124283043 creator A5064418308 @default.
- W2124283043 creator A5064991997 @default.
- W2124283043 creator A5073104666 @default.
- W2124283043 creator A5074689768 @default.
- W2124283043 creator A5080435165 @default.
- W2124283043 date "2009-02-25" @default.
- W2124283043 modified "2023-09-24" @default.
- W2124283043 title "Hydrogen injection and retention in nanocavities of single-crystalline silicon" @default.
- W2124283043 cites W1981990831 @default.
- W2124283043 cites W1990081473 @default.
- W2124283043 cites W1992657310 @default.
- W2124283043 cites W1996698229 @default.
- W2124283043 cites W2000105685 @default.
- W2124283043 cites W2002734768 @default.
- W2124283043 cites W2011891471 @default.
- W2124283043 cites W2014598504 @default.
- W2124283043 cites W2015839281 @default.
- W2124283043 cites W2021179714 @default.
- W2124283043 cites W2023590729 @default.
- W2124283043 cites W2026099211 @default.
- W2124283043 cites W2042484410 @default.
- W2124283043 cites W2052612340 @default.
- W2124283043 cites W2054936010 @default.
- W2124283043 cites W2062828490 @default.
- W2124283043 cites W2063331031 @default.
- W2124283043 cites W2079625725 @default.
- W2124283043 cites W2080564124 @default.
- W2124283043 cites W2082764440 @default.
- W2124283043 cites W2093150402 @default.
- W2124283043 cites W2615030411 @default.
- W2124283043 doi "https://doi.org/10.1088/0022-3727/42/6/062001" @default.
- W2124283043 hasPublicationYear "2009" @default.
- W2124283043 type Work @default.
- W2124283043 sameAs 2124283043 @default.
- W2124283043 citedByCount "6" @default.
- W2124283043 crossrefType "journal-article" @default.
- W2124283043 hasAuthorship W2124283043A5032811107 @default.
- W2124283043 hasAuthorship W2124283043A5054110521 @default.
- W2124283043 hasAuthorship W2124283043A5064418308 @default.
- W2124283043 hasAuthorship W2124283043A5064991997 @default.
- W2124283043 hasAuthorship W2124283043A5073104666 @default.
- W2124283043 hasAuthorship W2124283043A5074689768 @default.
- W2124283043 hasAuthorship W2124283043A5080435165 @default.
- W2124283043 hasConcept C127413603 @default.
- W2124283043 hasConcept C171250308 @default.
- W2124283043 hasConcept C178790620 @default.
- W2124283043 hasConcept C185592680 @default.
- W2124283043 hasConcept C192562407 @default.
- W2124283043 hasConcept C2779667780 @default.
- W2124283043 hasConcept C42360764 @default.
- W2124283043 hasConcept C49040817 @default.
- W2124283043 hasConcept C512968161 @default.
- W2124283043 hasConcept C544956773 @default.
- W2124283043 hasConceptScore W2124283043C127413603 @default.
- W2124283043 hasConceptScore W2124283043C171250308 @default.
- W2124283043 hasConceptScore W2124283043C178790620 @default.
- W2124283043 hasConceptScore W2124283043C185592680 @default.
- W2124283043 hasConceptScore W2124283043C192562407 @default.
- W2124283043 hasConceptScore W2124283043C2779667780 @default.
- W2124283043 hasConceptScore W2124283043C42360764 @default.
- W2124283043 hasConceptScore W2124283043C49040817 @default.
- W2124283043 hasConceptScore W2124283043C512968161 @default.
- W2124283043 hasConceptScore W2124283043C544956773 @default.
- W2124283043 hasIssue "6" @default.
- W2124283043 hasLocation W21242830431 @default.
- W2124283043 hasOpenAccess W2124283043 @default.
- W2124283043 hasPrimaryLocation W21242830431 @default.
- W2124283043 hasRelatedWork W2003391497 @default.
- W2124283043 hasRelatedWork W2032838383 @default.
- W2124283043 hasRelatedWork W2083321254 @default.
- W2124283043 hasRelatedWork W2104124026 @default.
- W2124283043 hasRelatedWork W2162501833 @default.
- W2124283043 hasRelatedWork W2318665658 @default.
- W2124283043 hasRelatedWork W2516915900 @default.
- W2124283043 hasRelatedWork W2743606619 @default.
- W2124283043 hasRelatedWork W2947061602 @default.
- W2124283043 hasRelatedWork W4310612335 @default.
- W2124283043 hasVolume "42" @default.
- W2124283043 isParatext "false" @default.
- W2124283043 isRetracted "false" @default.
- W2124283043 magId "2124283043" @default.
- W2124283043 workType "article" @default.