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• W2124340473 endingPage "193" @default.
• W2124340473 startingPage "191" @default.
• W2124340473 abstract "Strained-silicon (Si) is incorporated into a leading edge 90-nm logic technology . Strained-Si increases saturated n-type and p-type metal-oxide-semiconductor field-effect transistors (MOSFETs) drive currents by 10 and 25%, respectively. The process flow consists of selective epitaxial Si/sub 1-x/Ge/sub x/ in the source/drain regions to create longitudinal uniaxial compressive strain in the p-type MOSFET. A tensile Si nitride-capping layer is used to introduce tensile uniaxial strain into the n-type MOSFET and enhance electron mobility. Unlike past strained-Si work: 1) the amount of strain for the n-type and p-type MOSFET can be controlled independently on the same wafer and 2) the hole mobility enhancement in this letter is present at large vertical electric fields, thus, making this flow useful for nanoscale transistors in advanced logic technologies." @default.
• W2124340473 created "2016-06-24" @default.
• W2124340473 creator A5002847400 @default.
• W2124340473 creator A5010236237 @default.
• W2124340473 creator A5022988277 @default.
• W2124340473 creator A5029885341 @default.
• W2124340473 creator A5034924309 @default.
• W2124340473 creator A5038351570 @default.
• W2124340473 creator A5042525588 @default.
• W2124340473 creator A5043092503 @default.
• W2124340473 creator A5043208867 @default.
• W2124340473 creator A5049261167 @default.
• W2124340473 creator A5049806821 @default.
• W2124340473 creator A5057943957 @default.
• W2124340473 creator A5065708613 @default.
• W2124340473 creator A5065847328 @default.
• W2124340473 creator A5070372985 @default.
• W2124340473 creator A5074750047 @default.
• W2124340473 creator A5075781072 @default.
• W2124340473 creator A5079695645 @default.
• W2124340473 creator A5081213708 @default.
• W2124340473 date "2004-04-01" @default.
• W2124340473 modified "2023-10-18" @default.
• W2124340473 title "A Logic Nanotechnology Featuring Strained-Silicon" @default.
• W2124340473 cites W1512402821 @default.
• W2124340473 cites W1970681634 @default.
• W2124340473 cites W1980467913 @default.
• W2124340473 cites W2002257666 @default.
• W2124340473 cites W2039978858 @default.
• W2124340473 cites W2073720450 @default.
• W2124340473 cites W2089906032 @default.
• W2124340473 cites W2107037564 @default.
• W2124340473 cites W2114631300 @default.
• W2124340473 cites W2534163575 @default.
• W2124340473 cites W2536792177 @default.
• W2124340473 cites W2543985255 @default.
• W2124340473 doi "https://doi.org/10.1109/led.2004.825195" @default.
• W2124340473 hasPublicationYear "2004" @default.
• W2124340473 type Work @default.
• W2124340473 sameAs 2124340473 @default.
• W2124340473 citedByCount "476" @default.
• W2124340473 countsByYear W21243404732012 @default.
• W2124340473 countsByYear W21243404732013 @default.
• W2124340473 countsByYear W21243404732014 @default.
• W2124340473 countsByYear W21243404732015 @default.
• W2124340473 countsByYear W21243404732016 @default.
• W2124340473 countsByYear W21243404732017 @default.
• W2124340473 countsByYear W21243404732018 @default.
• W2124340473 countsByYear W21243404732019 @default.
• W2124340473 countsByYear W21243404732020 @default.
• W2124340473 countsByYear W21243404732021 @default.
• W2124340473 countsByYear W21243404732022 @default.
• W2124340473 countsByYear W21243404732023 @default.
• W2124340473 crossrefType "journal-article" @default.
• W2124340473 hasAuthorship W2124340473A5002847400 @default.
• W2124340473 hasAuthorship W2124340473A5010236237 @default.
• W2124340473 hasAuthorship W2124340473A5022988277 @default.
• W2124340473 hasAuthorship W2124340473A5029885341 @default.
• W2124340473 hasAuthorship W2124340473A5034924309 @default.
• W2124340473 hasAuthorship W2124340473A5038351570 @default.
• W2124340473 hasAuthorship W2124340473A5042525588 @default.
• W2124340473 hasAuthorship W2124340473A5043092503 @default.
• W2124340473 hasAuthorship W2124340473A5043208867 @default.
• W2124340473 hasAuthorship W2124340473A5049261167 @default.
• W2124340473 hasAuthorship W2124340473A5049806821 @default.
• W2124340473 hasAuthorship W2124340473A5057943957 @default.
• W2124340473 hasAuthorship W2124340473A5065708613 @default.
• W2124340473 hasAuthorship W2124340473A5065847328 @default.
• W2124340473 hasAuthorship W2124340473A5070372985 @default.
• W2124340473 hasAuthorship W2124340473A5074750047 @default.
• W2124340473 hasAuthorship W2124340473A5075781072 @default.
• W2124340473 hasAuthorship W2124340473A5079695645 @default.
• W2124340473 hasAuthorship W2124340473A5081213708 @default.
• W2124340473 hasConcept C106782819 @default.
• W2124340473 hasConcept C110738630 @default.
• W2124340473 hasConcept C119599485 @default.
• W2124340473 hasConcept C127413603 @default.
• W2124340473 hasConcept C131017901 @default.
• W2124340473 hasConcept C145598152 @default.
• W2124340473 hasConcept C160671074 @default.
• W2124340473 hasConcept C165801399 @default.
• W2124340473 hasConcept C171250308 @default.
• W2124340473 hasConcept C172385210 @default.
• W2124340473 hasConcept C192245399 @default.
• W2124340473 hasConcept C192562407 @default.
• W2124340473 hasConcept C2776390347 @default.
• W2124340473 hasConcept C2778413303 @default.
• W2124340473 hasConcept C2779227376 @default.
• W2124340473 hasConcept C2779667780 @default.
• W2124340473 hasConcept C49040817 @default.
• W2124340473 hasConcept C544956773 @default.
• W2124340473 hasConcept C80487327 @default.
• W2124340473 hasConceptScore W2124340473C106782819 @default.
• W2124340473 hasConceptScore W2124340473C110738630 @default.
• W2124340473 hasConceptScore W2124340473C119599485 @default.
• W2124340473 hasConceptScore W2124340473C127413603 @default.
• W2124340473 hasConceptScore W2124340473C131017901 @default.
• W2124340473 hasConceptScore W2124340473C145598152 @default.

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