Matches in SemOpenAlex for { <https://semopenalex.org/work/W2124377568> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2124377568 endingPage "3894" @default.
- W2124377568 startingPage "3888" @default.
- W2124377568 abstract "Two methods to measure acid diffusion in positive acid catalyzed resists are described. The first method employs a spectrophotometric titration to determine the acid concentration ([H+]) followed by measuring the ion conductivity (σ) of the resist film to determine the diffusion coefficient (D). This method allows the diffusion coefficient of acid in the resist to be determined at different temperatures ranging from room temperature to different post-exposure bake (PEB) temperatures. The second method is based on the threshold acid density theory of image formation, which assumes that when a critical concentration of acid is reached, the developer solubility of the resist is changed. With this method, a constant level of acid can be followed at different PEB times and the diffusion coefficient determined. A comparison of the two methods to measure the acid diffusion coefficient will be made and the temperature dependence of diffusion for different types of organic acids will be presented. Based on a previously described reaction–diffusion model that predicts relative deblocking levels, evidence is presented for room temperature diffusion of acid to be a possible explanation for delay instability in positive deep ultraviolet resists." @default.
- W2124377568 created "2016-06-24" @default.
- W2124377568 creator A5077761178 @default.
- W2124377568 date "1994-11-01" @default.
- W2124377568 modified "2023-09-25" @default.
- W2124377568 title "Effect of acid diffusion on performance in positive deep ultraviolet resists" @default.
- W2124377568 doi "https://doi.org/10.1116/1.587569" @default.
- W2124377568 hasPublicationYear "1994" @default.
- W2124377568 type Work @default.
- W2124377568 sameAs 2124377568 @default.
- W2124377568 citedByCount "53" @default.
- W2124377568 countsByYear W21243775682014 @default.
- W2124377568 countsByYear W21243775682018 @default.
- W2124377568 crossrefType "journal-article" @default.
- W2124377568 hasAuthorship W2124377568A5077761178 @default.
- W2124377568 hasConcept C113196181 @default.
- W2124377568 hasConcept C121332964 @default.
- W2124377568 hasConcept C126838900 @default.
- W2124377568 hasConcept C131540310 @default.
- W2124377568 hasConcept C143409427 @default.
- W2124377568 hasConcept C147789679 @default.
- W2124377568 hasConcept C155574463 @default.
- W2124377568 hasConcept C178790620 @default.
- W2124377568 hasConcept C184866935 @default.
- W2124377568 hasConcept C185592680 @default.
- W2124377568 hasConcept C192562407 @default.
- W2124377568 hasConcept C2776798109 @default.
- W2124377568 hasConcept C2779227376 @default.
- W2124377568 hasConcept C43617362 @default.
- W2124377568 hasConcept C49040817 @default.
- W2124377568 hasConcept C53403541 @default.
- W2124377568 hasConcept C53524968 @default.
- W2124377568 hasConcept C69357855 @default.
- W2124377568 hasConcept C70816921 @default.
- W2124377568 hasConcept C71924100 @default.
- W2124377568 hasConcept C97355855 @default.
- W2124377568 hasConceptScore W2124377568C113196181 @default.
- W2124377568 hasConceptScore W2124377568C121332964 @default.
- W2124377568 hasConceptScore W2124377568C126838900 @default.
- W2124377568 hasConceptScore W2124377568C131540310 @default.
- W2124377568 hasConceptScore W2124377568C143409427 @default.
- W2124377568 hasConceptScore W2124377568C147789679 @default.
- W2124377568 hasConceptScore W2124377568C155574463 @default.
- W2124377568 hasConceptScore W2124377568C178790620 @default.
- W2124377568 hasConceptScore W2124377568C184866935 @default.
- W2124377568 hasConceptScore W2124377568C185592680 @default.
- W2124377568 hasConceptScore W2124377568C192562407 @default.
- W2124377568 hasConceptScore W2124377568C2776798109 @default.
- W2124377568 hasConceptScore W2124377568C2779227376 @default.
- W2124377568 hasConceptScore W2124377568C43617362 @default.
- W2124377568 hasConceptScore W2124377568C49040817 @default.
- W2124377568 hasConceptScore W2124377568C53403541 @default.
- W2124377568 hasConceptScore W2124377568C53524968 @default.
- W2124377568 hasConceptScore W2124377568C69357855 @default.
- W2124377568 hasConceptScore W2124377568C70816921 @default.
- W2124377568 hasConceptScore W2124377568C71924100 @default.
- W2124377568 hasConceptScore W2124377568C97355855 @default.
- W2124377568 hasIssue "6" @default.
- W2124377568 hasLocation W21243775681 @default.
- W2124377568 hasOpenAccess W2124377568 @default.
- W2124377568 hasPrimaryLocation W21243775681 @default.
- W2124377568 hasRelatedWork W1977000635 @default.
- W2124377568 hasRelatedWork W1991929252 @default.
- W2124377568 hasRelatedWork W2024440805 @default.
- W2124377568 hasRelatedWork W2089856209 @default.
- W2124377568 hasRelatedWork W2095224020 @default.
- W2124377568 hasRelatedWork W2124377568 @default.
- W2124377568 hasRelatedWork W2367176878 @default.
- W2124377568 hasRelatedWork W2554889844 @default.
- W2124377568 hasRelatedWork W2901976597 @default.
- W2124377568 hasRelatedWork W3149857778 @default.
- W2124377568 hasVolume "12" @default.
- W2124377568 isParatext "false" @default.
- W2124377568 isRetracted "false" @default.
- W2124377568 magId "2124377568" @default.
- W2124377568 workType "article" @default.