FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2124643132> ?p ?o ?g. }

• W2124643132 endingPage "1642" @default.
• W2124643132 startingPage "1635" @default.
• W2124643132 abstract "The effects of minute amounts of impurities (H, OH, and F) in SiO/sub 2/ are investigated to obtain a guideline for improving the reliability of MOS devices. To examine the behavior of hydrogen, deuterium (D) is adopted as a tracer. The quantity of deuterium dissolved in SiO/sub 2/ is measured by the D(/sup 3/He,p)/sup 4/He nuclear resonant reaction (NRR) technique. The Influence of the impurities on the SiO/sub 2/-Si interface structure is studied by electron spin resonance (ESR) measurement. Hot-carrier injection with MOS capacitors and transistors are examined to determine the effects of minute impurities on the electrical characteristics of gate SiO/sub 2/ and the correlation of this effect with the NRR and ESR experimental results. It was found that significant amounts of D/sub 2/O are diffused into SiO/sub 2/, even at 200 degrees C, and these dissolved D/sub 2/O molecules are eliminated at temperatures above 700 degrees C. The number of unpaired bonds at the interface increases with decrease of dissolved water in SiO/sub 2/. The disappearance of the interface traps after high-temperature annealing above 800 degrees C is thought to be due to the viscous flow of SiO/sub 2/ and to the interface reoxidation. Reducing the hydrogen and relaxing the interface strain are essential for improving the MOS device endurance against hot carriers.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
• W2124643132 created "2016-06-24" @default.
• W2124643132 creator A5001665193 @default.
• W2124643132 creator A5004197324 @default.
• W2124643132 creator A5014405380 @default.
• W2124643132 creator A5023355459 @default.
• W2124643132 creator A5032906714 @default.
• W2124643132 creator A5036426806 @default.
• W2124643132 creator A5066340256 @default.
• W2124643132 date "1990-07-01" @default.
• W2124643132 modified "2023-10-01" @default.
• W2124643132 title "Effects of minute impurities (H, OH, F) on SiO/sub 2//Si interface as investigated by nuclear resonant reaction and electron spin resonance" @default.
• W2124643132 cites W1973785819 @default.
• W2124643132 cites W1974316407 @default.
• W2124643132 cites W1975277570 @default.
• W2124643132 cites W1977598035 @default.
• W2124643132 cites W1979108179 @default.
• W2124643132 cites W1981361726 @default.
• W2124643132 cites W1983878446 @default.
• W2124643132 cites W1988673072 @default.
• W2124643132 cites W2008217670 @default.
• W2124643132 cites W2008924362 @default.
• W2124643132 cites W2020059821 @default.
• W2124643132 cites W2023601712 @default.
• W2124643132 cites W2027278848 @default.
• W2124643132 cites W2029707735 @default.
• W2124643132 cites W2040078151 @default.
• W2124643132 cites W2045315138 @default.
• W2124643132 cites W2059893360 @default.
• W2124643132 cites W2063226476 @default.
• W2124643132 cites W2064023916 @default.
• W2124643132 cites W2065765234 @default.
• W2124643132 cites W2066973301 @default.
• W2124643132 cites W2071038271 @default.
• W2124643132 cites W2073813434 @default.
• W2124643132 cites W2086964428 @default.
• W2124643132 cites W2088077588 @default.
• W2124643132 cites W2090158445 @default.
• W2124643132 cites W2093914900 @default.
• W2124643132 cites W2114633550 @default.
• W2124643132 cites W2124810356 @default.
• W2124643132 cites W2129367594 @default.
• W2124643132 cites W2133890118 @default.
• W2124643132 cites W2136138725 @default.
• W2124643132 cites W2160160893 @default.
• W2124643132 cites W2576962131 @default.
• W2124643132 cites W4234512409 @default.
• W2124643132 doi "https://doi.org/10.1109/16.55750" @default.
• W2124643132 hasPublicationYear "1990" @default.
• W2124643132 type Work @default.
• W2124643132 sameAs 2124643132 @default.
• W2124643132 citedByCount "30" @default.
• W2124643132 countsByYear W21246431322021 @default.
• W2124643132 crossrefType "journal-article" @default.
• W2124643132 hasAuthorship W2124643132A5001665193 @default.
• W2124643132 hasAuthorship W2124643132A5004197324 @default.
• W2124643132 hasAuthorship W2124643132A5014405380 @default.
• W2124643132 hasAuthorship W2124643132A5023355459 @default.
• W2124643132 hasAuthorship W2124643132A5032906714 @default.
• W2124643132 hasAuthorship W2124643132A5036426806 @default.
• W2124643132 hasAuthorship W2124643132A5066340256 @default.
• W2124643132 hasConcept C113196181 @default.
• W2124643132 hasConcept C121332964 @default.
• W2124643132 hasConcept C139210041 @default.
• W2124643132 hasConcept C159985019 @default.
• W2124643132 hasConcept C178790620 @default.
• W2124643132 hasConcept C184779094 @default.
• W2124643132 hasConcept C185592680 @default.
• W2124643132 hasConcept C186927785 @default.
• W2124643132 hasConcept C187961010 @default.
• W2124643132 hasConcept C192562407 @default.
• W2124643132 hasConcept C2777855556 @default.
• W2124643132 hasConcept C46141821 @default.
• W2124643132 hasConcept C512968161 @default.
• W2124643132 hasConcept C544956773 @default.
• W2124643132 hasConcept C58364064 @default.
• W2124643132 hasConcept C71987851 @default.
• W2124643132 hasConceptScore W2124643132C113196181 @default.
• W2124643132 hasConceptScore W2124643132C121332964 @default.
• W2124643132 hasConceptScore W2124643132C139210041 @default.
• W2124643132 hasConceptScore W2124643132C159985019 @default.
• W2124643132 hasConceptScore W2124643132C178790620 @default.
• W2124643132 hasConceptScore W2124643132C184779094 @default.
• W2124643132 hasConceptScore W2124643132C185592680 @default.
• W2124643132 hasConceptScore W2124643132C186927785 @default.
• W2124643132 hasConceptScore W2124643132C187961010 @default.
• W2124643132 hasConceptScore W2124643132C192562407 @default.
• W2124643132 hasConceptScore W2124643132C2777855556 @default.
• W2124643132 hasConceptScore W2124643132C46141821 @default.
• W2124643132 hasConceptScore W2124643132C512968161 @default.
• W2124643132 hasConceptScore W2124643132C544956773 @default.
• W2124643132 hasConceptScore W2124643132C58364064 @default.
• W2124643132 hasConceptScore W2124643132C71987851 @default.
• W2124643132 hasIssue "7" @default.
• W2124643132 hasLocation W21246431321 @default.
• W2124643132 hasOpenAccess W2124643132 @default.
• W2124643132 hasPrimaryLocation W21246431321 @default.
• W2124643132 hasRelatedWork W1990756950 @default.

• next