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• W2124667051 abstract "We propose to utilize confocal Raman spectroscopy combined with high resolution atomic force microscopy (AFM) for nondestructive characterisation of the sidewalls of etched and passivated small pixel (24 μ m×24 μ m) focal plane arrays (FPA) fabricated using LW/LWIR InAs/GaSb type-II strained layer superlattice (T2SL) detector material. Special high aspect ratio Si and GaAs AFM probes, with tip length of 13 μ m and tip aperture less than 7°, allow characterisation of the sidewall morphology. Confocal microscopy enables imaging of the sidewall profile through optical sectioning. Raman spectra measured on etched T2SL FPA single pixels enable us to quantify the non-uniformity of the mesa delineation process." @default.
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• W2124667051 date "2015-06-04" @default.
• W2124667051 modified "2023-10-01" @default.
• W2124667051 title "Confocal Raman spectroscopy and AFM for evaluation of sidewalls in type II superlattice FPAs" @default.
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• W2124667051 doi "https://doi.org/10.1117/12.2178162" @default.
• W2124667051 hasPublicationYear "2015" @default.
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