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- W2124717645 abstract "Random fluctuations in fabrication process outcomes such as Si-SiO2 interface surface roughness (SR) and gate line edge roughness (LER) give rise to corresponding fluctuations in scaled down MOS device characteristics. These fluctuations are intra-die and inherent even to ideal processes. As such, they represent fiudamental limitations to the die-level uniformity of the properties of otherwise identical devices. Modeling based on statistical characterization of fluctuations in the characteristics of small 3D devices is becoming increasingly important to understand the implications for product designers and process engineers. [1-5]" @default.
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- W2124717645 date "2005-01-01" @default.
- W2124717645 modified "2023-09-26" @default.
- W2124717645 title "Interface and gate line edge roughness effects on intra die variance in mos device characteristics" @default.
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- W2124717645 doi "https://doi.org/10.1109/drc.2005.1553066" @default.
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