Matches in SemOpenAlex for { <https://semopenalex.org/work/W2124977430> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2124977430 endingPage "24013" @default.
- W2124977430 startingPage "24013" @default.
- W2124977430 abstract "Silicon carbide films were deposited at two deposition temperatures 350 °C and 450 °C by means of ECR plasma reactor with two gas mixtures: (1) gas mixture, SiH4 (5 sccm), CH4 (14 sccm), Ar (6 sccm), NH3 (2 sccm) and (2) gas mixture SiH4 (5 sccm), CH4 (14 sccm), H2 (6 sccm), NH3 (2 sccm). The concentration of species in the SiC films was determined by Rutherford backscattering spectrometry (RBS) and elastic recoil detection (ERD) analytical method simultaneously. Chemical compositions were analyzed by infrared (IR) spectroscopy. Photoluminescence (PL) spectra were measured at 300 K. The RBS and ERD results showed that the concentrations of Si and C in the films are practically the same. The concentration of hydrogen decreased from 30 to 22 at.% with an increasing sample deposition temperature. The films contain a small amount of nitrogen and oxygen. IR results showed the presence of Si-C, Si-N, Si-H, C-H and Si-O bonds. PL results showed the decrease of the PL intensity with an increasing sample deposition temperature." @default.
- W2124977430 created "2016-06-24" @default.
- W2124977430 creator A5002808800 @default.
- W2124977430 creator A5004676397 @default.
- W2124977430 creator A5019914938 @default.
- W2124977430 creator A5074427124 @default.
- W2124977430 creator A5084625553 @default.
- W2124977430 date "2011-10-28" @default.
- W2124977430 modified "2023-10-13" @default.
- W2124977430 title "Properties study of silicon carbide thin films prepared by electron cyclotron resonance plasma technology" @default.
- W2124977430 cites W1980075157 @default.
- W2124977430 cites W1983959535 @default.
- W2124977430 cites W1985204970 @default.
- W2124977430 cites W1991019731 @default.
- W2124977430 cites W1999144811 @default.
- W2124977430 cites W2015550378 @default.
- W2124977430 cites W2015622277 @default.
- W2124977430 cites W2016342040 @default.
- W2124977430 cites W2041240896 @default.
- W2124977430 cites W2056595302 @default.
- W2124977430 cites W2062391818 @default.
- W2124977430 doi "https://doi.org/10.1051/epjap/2011110153" @default.
- W2124977430 hasPublicationYear "2011" @default.
- W2124977430 type Work @default.
- W2124977430 sameAs 2124977430 @default.
- W2124977430 citedByCount "1" @default.
- W2124977430 countsByYear W21249774302013 @default.
- W2124977430 crossrefType "journal-article" @default.
- W2124977430 hasAuthorship W2124977430A5002808800 @default.
- W2124977430 hasAuthorship W2124977430A5004676397 @default.
- W2124977430 hasAuthorship W2124977430A5019914938 @default.
- W2124977430 hasAuthorship W2124977430A5074427124 @default.
- W2124977430 hasAuthorship W2124977430A5084625553 @default.
- W2124977430 hasBestOaLocation W21249774302 @default.
- W2124977430 hasConcept C113196181 @default.
- W2124977430 hasConcept C145148216 @default.
- W2124977430 hasConcept C171250308 @default.
- W2124977430 hasConcept C175361016 @default.
- W2124977430 hasConcept C178790620 @default.
- W2124977430 hasConcept C185592680 @default.
- W2124977430 hasConcept C19067145 @default.
- W2124977430 hasConcept C191897082 @default.
- W2124977430 hasConcept C192562407 @default.
- W2124977430 hasConcept C2776523803 @default.
- W2124977430 hasConcept C2780547777 @default.
- W2124977430 hasConcept C2780722187 @default.
- W2124977430 hasConcept C43617362 @default.
- W2124977430 hasConcept C49040817 @default.
- W2124977430 hasConcept C512968161 @default.
- W2124977430 hasConcept C540031477 @default.
- W2124977430 hasConcept C544956773 @default.
- W2124977430 hasConcept C57410435 @default.
- W2124977430 hasConcept C85080765 @default.
- W2124977430 hasConceptScore W2124977430C113196181 @default.
- W2124977430 hasConceptScore W2124977430C145148216 @default.
- W2124977430 hasConceptScore W2124977430C171250308 @default.
- W2124977430 hasConceptScore W2124977430C175361016 @default.
- W2124977430 hasConceptScore W2124977430C178790620 @default.
- W2124977430 hasConceptScore W2124977430C185592680 @default.
- W2124977430 hasConceptScore W2124977430C19067145 @default.
- W2124977430 hasConceptScore W2124977430C191897082 @default.
- W2124977430 hasConceptScore W2124977430C192562407 @default.
- W2124977430 hasConceptScore W2124977430C2776523803 @default.
- W2124977430 hasConceptScore W2124977430C2780547777 @default.
- W2124977430 hasConceptScore W2124977430C2780722187 @default.
- W2124977430 hasConceptScore W2124977430C43617362 @default.
- W2124977430 hasConceptScore W2124977430C49040817 @default.
- W2124977430 hasConceptScore W2124977430C512968161 @default.
- W2124977430 hasConceptScore W2124977430C540031477 @default.
- W2124977430 hasConceptScore W2124977430C544956773 @default.
- W2124977430 hasConceptScore W2124977430C57410435 @default.
- W2124977430 hasConceptScore W2124977430C85080765 @default.
- W2124977430 hasIssue "2" @default.
- W2124977430 hasLocation W21249774301 @default.
- W2124977430 hasLocation W21249774302 @default.
- W2124977430 hasLocation W21249774303 @default.
- W2124977430 hasLocation W21249774304 @default.
- W2124977430 hasLocation W21249774305 @default.
- W2124977430 hasOpenAccess W2124977430 @default.
- W2124977430 hasPrimaryLocation W21249774301 @default.
- W2124977430 hasRelatedWork W1967173531 @default.
- W2124977430 hasRelatedWork W1986458820 @default.
- W2124977430 hasRelatedWork W1994667595 @default.
- W2124977430 hasRelatedWork W2019112004 @default.
- W2124977430 hasRelatedWork W2034633699 @default.
- W2124977430 hasRelatedWork W2054870223 @default.
- W2124977430 hasRelatedWork W2068346546 @default.
- W2124977430 hasRelatedWork W2086342878 @default.
- W2124977430 hasRelatedWork W2124977430 @default.
- W2124977430 hasRelatedWork W2233400450 @default.
- W2124977430 hasVolume "56" @default.
- W2124977430 isParatext "false" @default.
- W2124977430 isRetracted "false" @default.
- W2124977430 magId "2124977430" @default.
- W2124977430 workType "article" @default.