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- W2125087202 abstract "Surface micromachined hinged flaps are assembled using thermo-kinetic forces in the molecular gas flow regime. Ultrasonic vibration energy is used to reduce static friction. The effective thermo-kinetic force is characterized as a function of pressure and temperature. The transition from the viscous to molecular flow regime is found to be flap size dependent. In the molecular flow regime the thermo-kinetic forces increase with increasing pressure and surface temperature. A suction based assembly jig suitable for automated MEMS batch assembly is also demonstrated." @default.
- W2125087202 created "2016-06-24" @default.
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- W2125087202 date "2003-06-25" @default.
- W2125087202 modified "2023-09-23" @default.
- W2125087202 title "Thermo-kinetic actuation for hinged structure batch microassembly" @default.
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- W2125087202 doi "https://doi.org/10.1109/memsys.2002.984238" @default.
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